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Journal of applied physics, 2018-10, Vol.124 (14)
2018
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Journal of applied physics, 2015-08, Vol.118 (5)
2015
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Nanotechnology, 2018-10, Vol.29 (40), p.405302-405302
2018
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Journal of applied physics, 2012-10, Vol.112 (8)
2012
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Microelectronic engineering, 2012-09, Vol.97, p.265-268
2012
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Ultramicroscopy, 2006-06, Vol.106 (8), p.881-887
2006
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Micromachines (Basel), 2021-03, Vol.12 (4), p.357
2021
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Nanomaterials (Basel, Switzerland), 2019-07, Vol.9 (7), p.1013
2019
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Microelectronic engineering, 2014-08, Vol.126, p.191-203
2014
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International Journal of Extreme Manufacturing, 2020-09, Vol.2 (3), p.32005
2020
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Beilstein journal of nanotechnology, 2018, Vol.9 (1), p.2855-2882
2018
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Measurement : journal of the International Measurement Confederation, 2022-01, Vol.188, p.110373, Article 110373
2022
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Plasma processes and polymers, 2019-09, Vol.16 (9)
2019
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Ultramicroscopy, 2023-06, Vol.248, p.113713-113713, Article 113713
2023
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Microelectronic engineering, 2020-04, Vol.227, p.111325, Article 111325
2020
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Measurement : journal of the International Measurement Confederation, 2022-03, Vol.191, p.110828, Article 110828
2022
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Nanotechnology, 2015-06, Vol.26 (23), p.235706-235706
2015
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Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2011-11, Vol.29 (6)
2011
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Microelectronic engineering, 2020-03, Vol.224, p.111234, Article 111234
2020
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Microelectronic engineering, 2017-06, Vol.177, p.78-86
2017
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Microelectronic engineering, 2017-06, Vol.177, p.19-24
2017
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Nano letters, 2021-07, Vol.21 (13), p.5493-5499
2021
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Selective Laser Ablation in Resists and Block Copolymers for High Resolution Lithographic Patterning
2015
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Journal of microelectromechanical systems, 2016-02, Vol.25 (1), p.78-90
2016
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Nanotechnology, 2020-10, Vol.31 (43), p.435303-435303
2020
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