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Large-area integration of two-dimensional materials and their heterostructures by wafer bonding

Nature communications, 2021-02, Vol.12 (1), p.917-917, Article 917

2021

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MEMS-Enabled Silicon Photonic Integrated Devices and Circuits

IEEE journal of quantum electronics, 2020-02, Vol.56 (1), p.1-10

2020

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Three-dimensional printing of silica glass with sub-micrometer resolution

Nature communications, 2023-06, Vol.14 (1), p.3305-3305, Article 3305

2023

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An apodized SOI waveguide-to-fiber surface grating coupler for single lithography silicon photonics

Optics express, 2011-02, Vol.19 (4), p.3592-3598

2011

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On-chip temperature compensation in an integrated slot-waveguide ring resonator refractive index sensor array

Optics express, 2010-02, Vol.18 (4), p.3226-3237

2010

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Silicon photonic microelectromechanical phase shifters for scalable programmable photonics

Optics letters, 2021-11, Vol.46 (22), p.5671-5674

2021

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Integrated silicon photonic MEMS

Microsystems & nanoengineering, 2023, Vol.9 (1), p.27-27, Article 27

2023

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High efficiency silicon nitride surface grating couplers

Optics express, 2008-01, Vol.16 (1), p.328-333

2008

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Carbon dioxide absorption spectroscopy with a mid-infrared silicon photonic waveguide

Optics letters, 2020-01, Vol.45 (1), p.109

2020

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MEMS for Photonic Integrated Circuits

IEEE journal of selected topics in quantum electronics, 2020-03, Vol.26 (2), p.1-16

2020

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Low-power optical beam steering by microelectromechanical waveguide gratings

Optics letters, 2019-02, Vol.44 (4), p.855-858

2019

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Low-power microelectromechanically tunable silicon photonic ring resonator add-drop filter

Optics letters, 2015-08, Vol.40 (15), p.3556-3559

2015

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Correction: Integrated silicon photonic MEMS

Microsystems & nanoengineering, 2024, Vol.10 (1), p.17-17, Article 17

2024

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Suspended polarization beam splitter on silicon-on-insulator

Optics express, 2018-02, Vol.26 (3), p.2675-2681

2018

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A large-area single-filament infrared emitter and its application in a spectroscopic ethanol gas sensing system

Microsystems & nanoengineering, 2021, Vol.7 (1), p.87-87, Article 87

2021

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Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch

Journal of microelectromechanical systems, 2021-04, Vol.30 (2), p.322-329

2021

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Ultrafast and Resist-Free Nanopatterning of 2D Materials by Femtosecond Laser Irradiation

ACS nano, 2023-05, Vol.17 (9), p.8041-8052

2023

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3D Printing of Glass Micro-Optics with Subwavelength Features on Optical Fiber Tips

ACS nano, 2024-04, Vol.18 (16), p.10788-10797

2024

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Slot-waveguide biochemical sensor

Optics letters, 2007-11, Vol.32 (21), p.3080

2007

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Wafer-Level Vacuum Sealing by Transfer Bonding of Silicon Caps for Small Footprint and Ultra-Thin MEMS Packages

Journal of microelectromechanical systems, 2019-06, Vol.28 (3), p.460-471

2019

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Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase

Optics express, 2023-02, Vol.31 (4), p.6540-6551

2023

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Correction: Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process

Nanoscale, 2023-11, Vol.15 (46), p.1894-1894

2023

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Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process

Nanoscale, 2023-11, Vol.15 (43), p.17335-17341

2023

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Influence of Humidity on Contact Resistance in Graphene Devices

ACS applied materials & interfaces, 2018-12, Vol.10 (48), p.41738-41746

2018

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Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors

ACS applied nano materials, 2024-01, Vol.7 (1), p.102-109

2024

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Large-area integration of two-dimensional materials and their heterostructures by wafer bonding

MEMS-Enabled Silicon Photonic Integrated Devices and Circuits

Three-dimensional printing of silica glass with sub-micrometer resolution

An apodized SOI waveguide-to-fiber surface grating coupler for single lithography silicon photonics

On-chip temperature compensation in an integrated slot-waveguide ring resonator refractive index sensor array

Silicon photonic microelectromechanical phase shifters for scalable programmable photonics

Integrated silicon photonic MEMS

High efficiency silicon nitride surface grating couplers

Carbon dioxide absorption spectroscopy with a mid-infrared silicon photonic waveguide

MEMS for Photonic Integrated Circuits

Low-power optical beam steering by microelectromechanical waveguide gratings

Low-power microelectromechanically tunable silicon photonic ring resonator add-drop filter

Correction: Integrated silicon photonic MEMS

Suspended polarization beam splitter on silicon-on-insulator

A large-area single-filament infrared emitter and its application in a spectroscopic ethanol gas sensing system

Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch

Ultrafast and Resist-Free Nanopatterning of 2D Materials by Femtosecond Laser Irradiation

3D Printing of Glass Micro-Optics with Subwavelength Features on Optical Fiber Tips

Slot-waveguide biochemical sensor

Wafer-Level Vacuum Sealing by Transfer Bonding of Silicon Caps for Small Footprint and Ultra-Thin MEMS Packages

Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase

Correction: Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process

Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process

Influence of Humidity on Contact Resistance in Graphene Devices

Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors

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