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Review of scanning probe micromachining and its applications within nanoscience

Microelectronic engineering, 2014-08, Vol.126, p.191-203

2014

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Adaptive AFM scan speed control for high aspect ratio fast structure tracking

Review of scientific instruments, 2014-10, Vol.85 (10)

2014

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Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100)

Measurement science & technology, 2024-08, Vol.35 (8), p.85011

2024

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Room-temperature single dopant atom quantum dot transistors in silicon, formed by field-emission scanning probe lithography

Journal of applied physics, 2018-10, Vol.124 (14)

2018

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Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection

Journal of visualized experiments, 2023-06 (196)

2023

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Profile simulation model for sub-50 nm cryogenic etching of silicon using SF6/O2 inductively coupled plasma

Journal of applied physics, 2015-08, Vol.118 (5)

2015

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Focused ion beam-based microfabrication of boron-doped diamond single-crystal tip cantilevers for electrical and mechanical scanning probe microscopy

Measurement : journal of the International Measurement Confederation, 2022-01, Vol.188, p.110373, Article 110373

2022

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Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features

Nanotechnology, 2018-10, Vol.29 (40), p.405302-405302

2018

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Atomic layer etching of SiO2 with Ar and CHF3 plasmas: A self‐limiting process for aspect ratio independent etching

Plasma processes and polymers, 2019-09, Vol.16 (9)

2019

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Novel type of whisker-tip cantilever based on GaN microrods for atomic force microscopy

Ultramicroscopy, 2023-06, Vol.248, p.113713-113713, Article 113713

2023

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Cryogenic etching for pattern transfer into silicon of Mix-and-Match structured resist layers

Microelectronic engineering, 2020-04, Vol.227, p.111325, Article 111325

2020

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Mix-and-match lithography and cryogenic etching for NIL template fabrication

Microelectronic engineering, 2020-03, Vol.224, p.111234, Article 111234

2020

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Sensitivity Improvement to Active Piezoresistive AFM Probes Using Focused Ion Beam Processing

Sensors (Basel, Switzerland), 2019-10, Vol.19 (20), p.4429

2019

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Corrigendum to “Focused ion beam-based microfabrication of boron-doped diamond single-crystal tip cantilevers for electrical and mechanical scanning probe microscopy”. [Measurement 188 (2022) 110373]

Measurement : journal of the International Measurement Confederation, 2022-03, Vol.191, p.110828, Article 110828

2022

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Multi-eigenmode control for high material contrast in bimodal and higher harmonic atomic force microscopy

Nanotechnology, 2015-06, Vol.26 (23), p.235706-235706

2015

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Charging effect simulation model used in simulations of plasma etching of silicon

Journal of applied physics, 2012-10, Vol.112 (8)

2012

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Advanced Scanning Probe Nanolithography Using GaN Nanowires

Nano letters, 2021-07, Vol.21 (13), p.5493-5499

2021

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Low-energy electron exposure of ultrathin polymer films with scanning probe lithography

Microelectronic engineering, 2017-06, Vol.177, p.78-86

2017

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Simulation of field emission from volcano-gated tips for scanning probe lithography

Microelectronic engineering, 2017-06, Vol.177, p.19-24

2017

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Micromachined self-actuated piezoresistive cantilever for high speed SPM

Microelectronic engineering, 2012-09, Vol.97, p.265-268

2012

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Tip Motion-Sensor Signal Relation for a Composite SPM/SPL Cantilever

Journal of microelectromechanical systems, 2016-02, Vol.25 (1), p.78-90

2016

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Silk as a biodegradable resist for field-emission scanning probe lithography

Nanotechnology, 2020-10, Vol.31 (43), p.435303-435303

2020

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Nanoscale Engineering and Optical Addressing of Single Spins in Diamond

Small (Weinheim an der Bergstrasse, Germany), 2010-10, Vol.6 (19), p.2117-2121

2010

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Components for high speed atomic force microscopy

Ultramicroscopy, 2006-06, Vol.106 (8), p.881-887

2006

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Active Microcantilevers for High Material Contrast in Harmonic Atomic Force Microscopy

Journal of microelectromechanical systems, 2015-10, Vol.24 (5), p.1622-1631

2015

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Review of scanning probe micromachining and its applications within nanoscience

Adaptive AFM scan speed control for high aspect ratio fast structure tracking

Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100)

Room-temperature single dopant atom quantum dot transistors in silicon, formed by field-emission scanning probe lithography

Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection

Profile simulation model for sub-50 nm cryogenic etching of silicon using SF6/O2 inductively coupled plasma

Focused ion beam-based microfabrication of boron-doped diamond single-crystal tip cantilevers for electrical and mechanical scanning probe microscopy

Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features

Atomic layer etching of SiO2 with Ar and CHF3 plasmas: A self‐limiting process for aspect ratio independent etching

Novel type of whisker-tip cantilever based on GaN microrods for atomic force microscopy

Cryogenic etching for pattern transfer into silicon of Mix-and-Match structured resist layers

Mix-and-match lithography and cryogenic etching for NIL template fabrication

Sensitivity Improvement to Active Piezoresistive AFM Probes Using Focused Ion Beam Processing

Corrigendum to “Focused ion beam-based microfabrication of boron-doped diamond single-crystal tip cantilevers for electrical and mechanical scanning probe microscopy”. [Measurement 188 (2022) 110373]

Multi-eigenmode control for high material contrast in bimodal and higher harmonic atomic force microscopy

Charging effect simulation model used in simulations of plasma etching of silicon

Advanced Scanning Probe Nanolithography Using GaN Nanowires

Low-energy electron exposure of ultrathin polymer films with scanning probe lithography

Simulation of field emission from volcano-gated tips for scanning probe lithography

Micromachined self-actuated piezoresistive cantilever for high speed SPM

Tip Motion-Sensor Signal Relation for a Composite SPM/SPL Cantilever

Silk as a biodegradable resist for field-emission scanning probe lithography

Nanoscale Engineering and Optical Addressing of Single Spins in Diamond

Components for high speed atomic force microscopy

Active Microcantilevers for High Material Contrast in Harmonic Atomic Force Microscopy

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