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Review on copper chemical–mechanical polishing (CMP) and post-CMP cleaning in ultra large system integrated (ULSI)—An electrochemical perspective

Electrochimica acta, 2007-01, Vol.52 (5), p.1825-1838

2007

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A novel C-domain-dependent inhibition of the rainbow trout CMP-sialic acid synthetase activity by CMP-deaminoneuraminic acid

Biochemical and biophysical research communications, 2022-08, Vol.617 (Pt 1), p.16-21

2022

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難加工次世代単結晶のための次世代型CMP加工技術: プラズマ/CMP同時融合加工の実用化に向けて

精密工学会誌, 2022/06/05, Vol.88(6), pp.435-439

2022

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CMP

A Dictionary of Geology and Earth Sciences, 2020

Michael Allaby

5, 2020

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Conjugated macro-microporous polymer films bearing tetraphenylethylenes for the enhanced sensing of nitrotoluenesElectronic supplementary information (ESI) available: Experimental procedures, SEM images of the assembled silica spheres, PXRD patterns of the MA-CMP-F and control CMP-F, the Stern-Volmer plots of the emission quenching behaviors of the MA-CMP-F and control CMP-F, the simulation results of the MA-CMP-F and substrates, emission quenching behaviors of the MA-CMP-F toward O2, NO2, perch

2018-09

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Highly efficient and damage-free polishing of GaN (0 0 0 1) by electrochemical etching-enhanced CMP process

Applied surface science, 2020-06, Vol.514, p.145957, Article 145957

2020

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CMP Aerogels: Ultrahigh-Surface-Area Carbon-Based Monolithic Materials with Superb Sorption Performance

Advanced materials (Weinheim), 2014-12, Vol.26 (47), p.8053-8058

2014

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Radiosynthesis and evaluation of [11C]CMP, a high affinity GSK3 ligand

Bioorganic & medicinal chemistry letters, 2019-03, Vol.29 (6), p.778-781

2019

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CMP legend: revolution and evolution

Japanese Journal of Applied Physics, 2022-08, Vol.61 (SJ), p.SJ0801

Tsujimura, Manabu

2022

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Biosynthesis of UDP-α‑N‑Acetyl‑d -mannosaminuronic Acid and CMP-β‑N‑Acetyl‑d‑neuraminic Acid for the Capsular Polysaccharides of Campylobacter jejuni

Biochemistry (Easton), 2024-03, Vol.63 (5), p.688-698

2024

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Advances in Chemical Mechanical Planarization (CMP)

Suryadevara, Babu

1, 2016

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Approaches to Sustainability in Chemical Mechanical Polishing (CMP): A Review

International Journal of Precision Engineering and Manufacturing-Green Technology, 2022, 9(1), , pp.349-367

2022

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Theoretical validation of inhibition mechanisms of benzotriazole with copper and cobalt for CMP and post-CMP cleaning applications

Microelectronic engineering, 2022-06, Vol.262, p.111833, Article 111833

2022

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A magnetically controlled chemical–mechanical polishing (MC‐CMP) approach for fabricating channel‐cut silicon crystal optics for the High Energy Photon Source

Journal of synchrotron radiation, 2023-01, Vol.30 (1), p.84-89

2023

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Insights into triazole derivatives as potential corrosion inhibitors in CMP process: Experimental evaluation and theoretical analysis

Applied surface science, 2022-11, Vol.602, p.154165, Article 154165

2022

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CMP-PIM: an energy-efficient comparator-based processing-in-memory neural network accelerator

Proceedings of the 55th Annual Design Automation Conference, 2018, p.1-6

2018

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Chemoenzymatic synthesis of CMP–sialic acid derivatives by a one-pot two-enzyme system: comparison of substrate flexibility of three microbial CMP–sialic acid synthetases

Bioorganic & medicinal chemistry, 2004-12, Vol.12 (24), p.6427-6435

2004

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XPS, UV–vis spectroscopy and AFM studies on removal mechanisms of Si-face SiC wafer chemical mechanical polishing (CMP)

Applied surface science, 2014-10, Vol.316, p.643-648

2014

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Probing the CMP‐Sialic Acid Donor Specificity of Two Human β‐d‐Galactoside Sialyltransferases (ST3Gal I and ST6Gal I) Selectively Acting on O‐ and N‐Glycosylproteins

Chembiochem : a European journal of chemical biology, 2017-07, Vol.18 (13), p.1251-1259

2017

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Investigation of green alkaline pH regulators on sapphire UV-CMP

Tribology international, 2023-02, Vol.178, p.108047, Article 108047

2023

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Corrosion control of copper wiring by barrier CMP slurry containing azole inhibitor: Combination of simulation and experiment

Colloids and surfaces. A, Physicochemical and engineering aspects, 2020-08, Vol.599, p.124872, Article 124872

2020

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Coexpression of CMP‐sialic acid transporter reduces N‐glycolylneuraminic acid levels of recombinant glycoproteins in Chinese hamster ovary cells

Biotechnology and bioengineering, 2019-11, Vol.116 (11), p.2815-2822

2019

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Femtosecond laser modification of silicon carbide substrates and its influence on CMP process

Ceramics international, 2021-05, Vol.47 (10), p.13322-13330

2021

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Structural and functional characterization of CMP‐N‐acetylneuraminate synthetase from Vibrio cholerae

Acta crystallographica. Section D, Biological crystallography., 2019-06, Vol.75 (6), p.564-577

2019

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An Output-Capacitor-Free Synthesizable Digital LDO Using CMP-Triggered Oscillator and Droop Detector

IEEE journal of solid-state circuits, 2023-06, Vol.58 (6), p.1769-1781

2023

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