Details

Autor(en) / Beteiligte

• Quack, Niels
• Sattari, Hamed
• Takabayashi, Alain Yuji
• Zhang, Yu
• Verheyen, Peter
• Bogaerts, Wim
• Edinger, Pierre
• Errando-Herranz, Carlos
• Gylfason, Kristinn B.

Titel

MEMS-Enabled Silicon Photonic Integrated Devices and Circuits

Ist Teil von

• IEEE journal of quantum electronics, 2020-02, Vol.56 (1), p.1-10

Ort / Verlag

New York: IEEE

Erscheinungsjahr

2020

Link zum Volltext

Quelle

IEEE/IET Electronic Library (IEL)

Beschreibungen/Notizen

• Photonic integrated circuits have seen a dramatic increase in complexity over the past decades. This development has been spurred by recent applications in datacenter communications and enabled by the availability of standardized mature technology platforms. Mechanical movement of wave-guiding structures at the micro- and nanoscale provides unique opportunities to further enhance functionality and to reduce power consumption in photonic integrated circuits. We here demonstrate integration of MEMS-enabled components in a simplified silicon photonics process based on IMEC's Standard iSiPP50G Silicon Photonics Platform and a custom release process.