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Measurement of electron velocity distribution function in a pulsed positive streamer discharge in atmospheric-pressure air

Journal of physics. D, Applied physics, 2020-02, Vol.53 (8), p.8

2020

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Time-resolved two-dimensional measurements of the electron density, electron temperature, and drift velocity of laser-produced carbon plasmas using the ion feature of collective laser Thomson scattering

Applied physics express, 2021-06, Vol.14 (6), p.66001

2021

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Measurements of spatial distributions of electron density and temperature of 450 MHz UHF plasma using laser Thomson scattering

Japanese Journal of Applied Physics, 2021-01, Vol.60 (SA), p.SAAB03

2021

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Effect of Hydrogen Ion Energy in the Process of Reactive Ion Etching of Sn Thin Films by Hydrogen Plasmas

Plasma and Fusion Research, 2021/02/08, Vol.16, pp.1406003-1406003

2021

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Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources

Scientific reports, 2017-10, Vol.7 (1), p.12328-7, Article 12328

2017

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Feasibility study on reactive ion etching occurrence in EUV-induced photoionized hydrogen plasmas based on electron temperature and electron density measurements

Japanese Journal of Applied Physics, 2022-05, Vol.61 (5), p.56001

2022

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Time-resolved spatial profiles of electron density and temperature in hydrogen plasmas induced by radiation from laser-produced tin plasmas for extreme ultraviolet lithography light sources

Japanese Journal of Applied Physics, 2021-06, Vol.60 (6), p.66002

2021

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Simulation of spatial characteristics of very high frequency hydrogen plasma produced by a balanced power feeding

Thin solid films, 2013-11, Vol.547, p.132-136

2013

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Electronic data acquisition and operational control system for time‐of‐flight sputtered neutral mass spectrometer

Surface and interface analysis, 2019-01, Vol.51 (1), p.35-39

2019

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Evaluation of Hydrogen-Induced Blistering of Mo/Si Multilayers with a Capping Layer

Plasma and Fusion Research, 2022/02/21, Vol.17, pp.1406005-1406005

2022

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Evaluation of multi-turn time-of-flight mass spectrum of laser ionization mass nanoscope

Surface and interface analysis, 2016-11, Vol.48 (11), p.1122-1126

2016

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Electron density change of atmospheric-pressure plasmas in helium flow depending on the oxygen/nitrogen ratio of the surrounding atmosphere

Japanese Journal of Applied Physics, 2016-06, Vol.55 (6), p.66101

2016

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Two-dimensional simulations of multi-hollow VHF SiH4/H2 plasma

AIP advances, 2018-02, Vol.8 (2), p.025316-025316-10

2018

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Synthesis of photochromic nanoparticles and determination of the mechanism of photochromism

AIP advances, 2016-05, Vol.6 (5), p.055214-055214-7

2016

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Spatial profiles of electron density, electron temperature, average ionic charge, and EUV emission of laser-produced Sn plasmas for EUV lithography

Japanese Journal of Applied Physics, 2017-03, Vol.56 (3), p.36201-036201

2017

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Simulation of balanced power feeding plasma surrounded by a metal box

Japanese Journal of Applied Physics, 2015-01, Vol.54 (1S), p.1

2015

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Temporal evolution of electron density and electron temperature profiles in a non-thermal atmospheric-pressure plasma measured by laser Thomson scattering

Japanese Journal of Applied Physics, 2015-01, Vol.54 (1), p.16101-1-016101-4

2015

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High spatial resolution imaging of helium isotope by TOF-SNMS

Surface and interface analysis, 2016-11, Vol.48 (11), p.1190-1193

2016

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Development of an Ultra-High Performance Multi-Turn TOF-SIMS/SNMS System “MULTUM-SIMS/SNMS”

Journal of the American Society for Mass Spectrometry, 2013-02, Vol.24 (2), p.222-229

2013

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Simulation of Effective Production of Very High Frequency Hydrogen Plasma Using a Balanced Power Feeding Method

Japanese Journal of Applied Physics, 2013-11, Vol.52 (11), p.11ND01-11ND01-5

2013

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Quantitative analysis of helium by post-ionization method using femtosecond laser technique

Surface and interface analysis, 2016-11, Vol.48 (11), p.1181-1184

2016

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Study of spatial profiles of capacitively coupled VHF H2 plasma by simulation

Japanese Journal of Applied Physics, , Vol.56 (1S)

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Two-dimensional simulations of a VHF H2 plasma for different discharge gaps and gas pressures

Japanese Journal of Applied Physics, 2016, Vol.55 (7S2)

2016

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Measurement of Electron Density and Temperature Using Laser Thomson Scattering in PANTA

Plasma and Fusion Research, 2017/05/16, Vol.12, pp.1401018-1401018

2017

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Development of laser ionization mass nanoscope (LIMAS)

Surface and interface analysis, 2012-06, Vol.44 (6), p.635-640

2012

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Measurement of electron velocity distribution function in a pulsed positive streamer discharge in atmospheric-pressure air

Time-resolved two-dimensional measurements of the electron density, electron temperature, and drift velocity of laser-produced carbon plasmas using the ion feature of collective laser Thomson scattering

Measurements of spatial distributions of electron density and temperature of 450 MHz UHF plasma using laser Thomson scattering

Effect of Hydrogen Ion Energy in the Process of Reactive Ion Etching of Sn Thin Films by Hydrogen Plasmas

Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources

Feasibility study on reactive ion etching occurrence in EUV-induced photoionized hydrogen plasmas based on electron temperature and electron density measurements

Time-resolved spatial profiles of electron density and temperature in hydrogen plasmas induced by radiation from laser-produced tin plasmas for extreme ultraviolet lithography light sources

Simulation of spatial characteristics of very high frequency hydrogen plasma produced by a balanced power feeding

Electronic data acquisition and operational control system for time‐of‐flight sputtered neutral mass spectrometer

Evaluation of Hydrogen-Induced Blistering of Mo/Si Multilayers with a Capping Layer

Evaluation of multi-turn time-of-flight mass spectrum of laser ionization mass nanoscope

Electron density change of atmospheric-pressure plasmas in helium flow depending on the oxygen/nitrogen ratio of the surrounding atmosphere

Two-dimensional simulations of multi-hollow VHF SiH4/H2 plasma

Synthesis of photochromic nanoparticles and determination of the mechanism of photochromism

Spatial profiles of electron density, electron temperature, average ionic charge, and EUV emission of laser-produced Sn plasmas for EUV lithography

Simulation of balanced power feeding plasma surrounded by a metal box

Temporal evolution of electron density and electron temperature profiles in a non-thermal atmospheric-pressure plasma measured by laser Thomson scattering

High spatial resolution imaging of helium isotope by TOF-SNMS

Development of an Ultra-High Performance Multi-Turn TOF-SIMS/SNMS System “MULTUM-SIMS/SNMS”

Simulation of Effective Production of Very High Frequency Hydrogen Plasma Using a Balanced Power Feeding Method

Quantitative analysis of helium by post-ionization method using femtosecond laser technique

Study of spatial profiles of capacitively coupled VHF H2 plasma by simulation

Two-dimensional simulations of a VHF H2 plasma for different discharge gaps and gas pressures

Measurement of Electron Density and Temperature Using Laser Thomson Scattering in PANTA

Development of laser ionization mass nanoscope (LIMAS)

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