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Piezoelectricity in Y0.09Al0.91N thin films

Materials science & engineering. B, Solid-state materials for advanced technology, 2022-02, Vol.276, p.1, Article 115543

2022

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A numerical method to determine the displacement spectrum of micro-plates in viscous fluids

Computers & structures, 2022-02, Vol.260, p.106716, Article 106716

2022

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Static and dynamic performance of bistable MEMS membranes

Sensors and actuators. A. Physical., 2018-10, Vol.282, p.259-268

2018

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Accuracy and precision of resonant piezoelectric MEMS viscosity sensors in highly viscous bituminous materials

Sensors and actuators. A. Physical., 2022-11, Vol.347, p.113903, Article 113903

2022

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Influence of the AlN/Pt-ratio on the electro-mechanical properties of multilayered AlN/Pt thin film strain gauges at high temperatures

Sensors and actuators. A. Physical., 2020-02, Vol.302, p.111805, Article 111805

2020

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Electro-mechanical properties of multilayered aluminum nitride and platinum thin films at high temperatures

Sensors and actuators. A. Physical., 2019-07, Vol.293, p.128-135

2019

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High finesse microcavities in the optical telecom O-band

Applied physics letters, 2021-11, Vol.119 (22)

2021

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3D characterisation of piezoelectric bistable MEMS membranes during switching

Sensors and actuators. A. Physical., 2019-10, Vol.298, p.111576, Article 111576

2019

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Wireless sensor node powered by aircraft specific thermoelectric energy harvesting

Sensors and actuators. A. Physical., 2011-12, Vol.172 (1), p.240-244

2011

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Mechanical and electrical characterization of resonant piezoelectric microbridges for strain sensing

Sensors and actuators. A. Physical., 2022-10, Vol.346, p.113829, Article 113829

2022

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Theoretical and experimental investigations of barrier height inhomogeneities in poly-Si/4H-SiC heterojunction diodes

Semiconductor science and technology, 2020-11, Vol.35 (11), p.115011

2020

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The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films

Materials science & engineering. B, Solid-state materials for advanced technology, 2010-09, Vol.172 (3), p.253-258

2010

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Impact of annealing temperature on the mechanical and electrical properties of sputtered aluminum nitride thin films

Journal of applied physics, 2015-02, Vol.117 (6)

2015

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Influence of metallic catalyst and doping level on the metal assisted chemical etching of silicon

Scripta materialia, 2016-03, Vol.114, p.27-30

2016

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α-phase PVDF MEMS cantilever excited by electrostriction and evaluated up to 160 °C in air by laser-Doppler vibrometry

Journal of applied physics, 2021-06, Vol.129 (21)

2021

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Impact of doping level on the metal assisted chemical etching of p-type silicon

Sensors and actuators. B, Chemical, 2014-03, Vol.193, p.883-887

2014

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A thermoelectric-based energy harvesting module with extended operational temperature range for powering autonomous wireless sensor nodes in aircraft

Sensors and actuators. A. Physical., 2014-02, Vol.206, p.159-164

2014

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Improved piezoelectric constants of sputtered aluminium nitride thin films by pre-conditioning of the silicon surface

Journal of physics. D, Applied physics, 2015-10, Vol.48 (40), p.405301-405307

2015

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Temperature and ambient atmosphere dependent electrical characterization of sputtered IrO2/TiO2/IrO2 capacitors

Journal of applied physics, 2022-03, Vol.131 (9)

2022

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Magnetic and microstructural properties of sputter deposited Cr-doped aluminum nitride thin films on silicon substrates

Journal of applied physics, 2017-03, Vol.121 (11)

2017

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Fundamental properties of a-SiNx:H thin films deposited by ICP-PECVD for MEMS applications

Applied surface science, 2013-11, Vol.284, p.348-353

2013

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Sound dissipation from plate-type resonators excited in non-conventional transversal modes in liquids

Journal of micromechanics and microengineering, 2020-07, Vol.30 (7), p.75004

2020

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Thermoelectric Energy Harvesting Using Phase Change Materials (PCMs) in High Temperature Environments in Aircraft

Journal of electronic materials, 2014-06, Vol.43 (6), p.1809-1814

2014

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Barrier height tuning by inverse sputter etching at poly-Si/4H-SiC heterojunction diodes

Semiconductor science and technology, 2021-05, Vol.36 (5), p.55021

2021

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Mechanical and electrical properties of DC magnetron sputter deposited amorphous silicon nitride thin films

Thin solid films, 2015-08, Vol.589, p.227-232

2015

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Piezoelectricity in Y0.09Al0.91N thin films

A numerical method to determine the displacement spectrum of micro-plates in viscous fluids

Static and dynamic performance of bistable MEMS membranes

Accuracy and precision of resonant piezoelectric MEMS viscosity sensors in highly viscous bituminous materials

Influence of the AlN/Pt-ratio on the electro-mechanical properties of multilayered AlN/Pt thin film strain gauges at high temperatures

Electro-mechanical properties of multilayered aluminum nitride and platinum thin films at high temperatures

High finesse microcavities in the optical telecom O-band

3D characterisation of piezoelectric bistable MEMS membranes during switching

Wireless sensor node powered by aircraft specific thermoelectric energy harvesting

Mechanical and electrical characterization of resonant piezoelectric microbridges for strain sensing

Theoretical and experimental investigations of barrier height inhomogeneities in poly-Si/4H-SiC heterojunction diodes

The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films

Impact of annealing temperature on the mechanical and electrical properties of sputtered aluminum nitride thin films

Influence of metallic catalyst and doping level on the metal assisted chemical etching of silicon

α-phase PVDF MEMS cantilever excited by electrostriction and evaluated up to 160 °C in air by laser-Doppler vibrometry

Impact of doping level on the metal assisted chemical etching of p-type silicon

A thermoelectric-based energy harvesting module with extended operational temperature range for powering autonomous wireless sensor nodes in aircraft

Improved piezoelectric constants of sputtered aluminium nitride thin films by pre-conditioning of the silicon surface

Temperature and ambient atmosphere dependent electrical characterization of sputtered IrO2/TiO2/IrO2 capacitors

Magnetic and microstructural properties of sputter deposited Cr-doped aluminum nitride thin films on silicon substrates

Fundamental properties of a-SiNx:H thin films deposited by ICP-PECVD for MEMS applications

Sound dissipation from plate-type resonators excited in non-conventional transversal modes in liquids

Thermoelectric Energy Harvesting Using Phase Change Materials (PCMs) in High Temperature Environments in Aircraft

Barrier height tuning by inverse sputter etching at poly-Si/4H-SiC heterojunction diodes

Mechanical and electrical properties of DC magnetron sputter deposited amorphous silicon nitride thin films

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