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Micromachines (Basel), 2014-12, Vol.5 (4), p.1310-1322
2014
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Microelectronic engineering, 2017-08, Vol.180, p.81-85
2017
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Microsystem technologies, 2013-03, Vol.19 (3), p.425-431
2013
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Journal of microelectromechanical systems, 2011-08, Vol.20 (4), p.794-796
2011
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Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2018-03, Vol.36 (2)
2018
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Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2016-03, Vol.34 (2)
2016
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2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), 2016, p.1137-1140
2016
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2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2014, p.160-165
2014
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