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Sensors and materials, 2023-06, Vol.35 (6), p.1957
2023
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Applied physics letters, 2022-12, Vol.121 (24)
2022
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Applied physics letters, 2020-11, Vol.117 (19)
2020
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Journal of micromechanics and microengineering, 2021-12, Vol.31 (12), p.125008
2021
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Micromachines (Basel), 2020-03, Vol.11 (3), p.267
2020
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IEEE transactions on instrumentation and measurement, 2022, Vol.71, p.1-7
2022
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Japanese Journal of Applied Physics, 2022-07, Vol.61 (SH), p.SH1013
2022
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Sensors and materials, , Vol.34 (4), p.1527
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Materials science in semiconductor processing, 2023-04, Vol.157, p.107306, Article 107306
2023
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IEEE transactions on semiconductor manufacturing, 2020-05, Vol.33 (2), p.180-186
2020
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Micromachines (Basel), 2017-09, Vol.8 (10), p.293
2017
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Japanese Journal of Applied Physics, 2016-10, Vol.55 (10), p.107201
2016
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Journal of microelectromechanical systems, 2016-08, Vol.25 (4), p.652-661
2016
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Reliability of potassium ion electret in silicon oxide for vibrational energy harvester applications
2015
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Biophysical journal, 2008-01, Vol.94 (1), p.63-70
2008
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Sensors and materials, 2019-01, Vol.31 (9), p.2779
2019
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Sensors and actuators. A. Physical., 2022-04, Vol.337, p.113448, Article 113448
2022
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Chemphyschem, 2007-08, Vol.8 (12), p.1875-1880
2007
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2013-03, Vol.31 (2)
2013
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Electronics and communications in Japan, 2018-04, Vol.101 (4), p.15-23
2018
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Review of scientific instruments, 2009-09, Vol.80 (9), p.095104-095104-5
2009
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IEEE transactions on electron devices, 2012-08, Vol.59 (8), p.2235-2242
2012
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Journal of microelectromechanical systems, 2022-06, Vol.31 (3), p.424-434
2022
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Sensors and actuators. A, Physical, 2002-04, Vol.97, p.478-485
2002
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Journal of micromechanics and microengineering, 2019-08, Vol.29 (8), p.84002
2019
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