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Grain to grain heterogeneity in PZT thin films as probed by in situ biasing XRD

Journal of applied physics, 2023-01, Vol.133 (4)

2023

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Catalyst preparation for CMOS-compatible silicon nanowire synthesis

Nature nanotechnology, 2009-10, Vol.4 (10), p.654-657

2009

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Removal of poly(methyl methacrylate) in diblock copolymers films studied by grazing incidence small‐angle X‐ray scattering

Journal of polymer science. Part B, Polymer physics, 2016-06, Vol.54 (12), p.1137-1144

2016

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Use of Nanosecond Laser Annealing for Thermally Stable Ni(GeSn) Alloys

IEEE journal of the Electron Devices Society, 2023, Vol.11, p.687-694

2023

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Formation and annealing of dislocation loops induced by nitrogen implantation of ZnO

Journal of applied physics, 2011-01, Vol.109 (2), p.023513-023513-8

2011

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Probing Self-Assembly of Cylindrical Morphology Block Copolymer Using in Situ and ex Situ Grazing Incidence Small-Angle X‑ray Scattering: The Attractive Case of Graphoepitaxy

Macromolecules, 2014-10, Vol.47 (20), p.7221-7229

2014

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Copper Direct-Bonding Characterization and Its Interests for 3D Integration

Journal of the Electrochemical Society, 2009, Vol.156 (10), p.H772

2009

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3D chemical imaging based on a third-generation synchrotron source

TrAC, Trends in analytical chemistry (Regular ed.), 2010-06, Vol.29 (6), p.518-527

2010

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Modeling and Integration Phenomena of metal-metal direct bonding technology

ECS transactions, 2014-08, Vol.64 (5), p.339-355

2014

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Lattice Relaxation and Dislocation Reduction in MBE CdTe(211)B/Ge(211)

Journal of electronic materials, 2010-07, Vol.39 (7), p.908-911

2010

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Multi-branch neural network for hybrid metrology improvement

Small (Weinheim an der Bergstrasse, Germany), 2022, Vol.18 (4)

2022

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Reconstruction of the in-depth profile of line gratings with critical dimension grazing incidence small angle x-ray scattering on laboratory equipment

Journal of Micro/Nanopatterning, Materials, and Metrology, 2023-07, Vol.22 (3)

2023

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Ni-based metallization of GeSn layers: A review and recent advances

Microelectronic engineering, 2023-01, Vol.269, p.111919, Article 111919

2023

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Impact of Sn on the Ti/Ge solid-state reaction: Phase formation sequence, morphological and electrical properties

Microelectronic engineering, 2022-01, Vol.252, p.111667, Article 111667

2022

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InGaAs-OI Substrate Fabrication on a 300 mm Wafer

Journal of low power electronics and applications, 2016-12, Vol.6 (4), p.19-19

2016

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Impact of alloying elements (Co, Pt) on nickel stanogermanide formation

Materials science in semiconductor processing, 2020-03, Vol.108, p.104890, Article 104890

2020

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GeSn Lasers Covering a Wide Wavelength Range Thanks to Uniaxial Tensile Strain

ACS photonics, 2019-10, Vol.6 (10), p.2462-2469

2019

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Plasma surface treatment of GeSn layers and its subsequent impact on Ni / GeSn solid-state reaction

Microelectronic engineering, 2022-03, Vol.257, p.111737, Article 111737

2022

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Study of GaN coalescence by dark‐field X‐ray microscopy at the nanoscale

Journal of applied crystallography, 2023-06, Vol.56 (3), p.643-649

2023

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Data fusion by artificial neural network for hybrid metrology development

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2021, Vol.39 (1)

2021

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Ni(Pt)-based CMOS-compatible contacts on p-InGaAs for III–V photonic devices

Materials science in semiconductor processing, 2023-02, Vol.154, p.107199, Article 107199

2023

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Integration of the Ni/InP system on a 300 mm platform for III-V/Si hybrid lasers

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2020-01, Vol.38 (1)

2020

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Superconducting V$_3$Si for quantum circuit applications

Microelectronic engineering, 2021-05, Vol.244-246

2021

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Influence of oxide density on O 2 diffusivity in thermally grown SiO 2 on Si and SiGe and on oxidation kinetics

Semiconductor science and technology, 2019-06, Vol.34 (6), p.65023

2019

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Influence of oxide density on O2 diffusivity in thermally grown SiO2 on Si and SiGe and on oxidation kinetics

Semiconductor science and technology, 2019-05, Vol.34 (6)

2019

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Grain to grain heterogeneity in PZT thin films as probed by in situ biasing XRD

Catalyst preparation for CMOS-compatible silicon nanowire synthesis

Removal of poly(methyl methacrylate) in diblock copolymers films studied by grazing incidence small‐angle X‐ray scattering

Use of Nanosecond Laser Annealing for Thermally Stable Ni(GeSn) Alloys

Formation and annealing of dislocation loops induced by nitrogen implantation of ZnO

Probing Self-Assembly of Cylindrical Morphology Block Copolymer Using in Situ and ex Situ Grazing Incidence Small-Angle X‑ray Scattering: The Attractive Case of Graphoepitaxy

Copper Direct-Bonding Characterization and Its Interests for 3D Integration

3D chemical imaging based on a third-generation synchrotron source

Modeling and Integration Phenomena of metal-metal direct bonding technology

Lattice Relaxation and Dislocation Reduction in MBE CdTe(211)B/Ge(211)

Multi-branch neural network for hybrid metrology improvement

Reconstruction of the in-depth profile of line gratings with critical dimension grazing incidence small angle x-ray scattering on laboratory equipment

Ni-based metallization of GeSn layers: A review and recent advances

Impact of Sn on the Ti/Ge solid-state reaction: Phase formation sequence, morphological and electrical properties

InGaAs-OI Substrate Fabrication on a 300 mm Wafer

Impact of alloying elements (Co, Pt) on nickel stanogermanide formation

GeSn Lasers Covering a Wide Wavelength Range Thanks to Uniaxial Tensile Strain

Plasma surface treatment of GeSn layers and its subsequent impact on Ni / GeSn solid-state reaction

Study of GaN coalescence by dark‐field X‐ray microscopy at the nanoscale

Data fusion by artificial neural network for hybrid metrology development

Ni(Pt)-based CMOS-compatible contacts on p-InGaAs for III–V photonic devices

Integration of the Ni/InP system on a 300 mm platform for III-V/Si hybrid lasers

Superconducting V$_3$Si for quantum circuit applications

Influence of oxide density on O 2 diffusivity in thermally grown SiO 2 on Si and SiGe and on oxidation kinetics

Influence of oxide density on O2 diffusivity in thermally grown SiO2 on Si and SiGe and on oxidation kinetics

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