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Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2023-12, Vol.1057, p.168670, Article 168670

2023

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A thick silicon dioxide fabrication process based on electrochemical trenching of silicon

Sensors and actuators. A. Physical., 2003-11, Vol.107 (3), p.279-284

2003

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A silicon crystalline resistor with an adsorbing porous layer as gas sensor

Sensors and actuators. B, Chemical, 2005-03, Vol.105 (2), p.278-282

2005

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