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Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM

Materials science in semiconductor processing, 2017-11, Vol.71, p.433-440

2017

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A comparative study of C, N and Xe pre-amorphization implantation processes for improving the thermal stability of NiSi films

Microelectronic engineering, 2024-08, Vol.291, p.112210, Article 112210

2024

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Phase decomposition in the Ni–InGaAs system at high annealing temperature

Journal of materials science, 2023-10, Vol.58 (40), p.15738-15747

2023

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Influence of dual Ge/C pre-amorphization implantation on the Ni1−Pt Si phase nucleation and growth mechanisms

Microelectronic engineering, 2021-05, Vol.244-246, p.111571, Article 111571

2021

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Evolution of the Ni0.9Pt0.1/Si system under annealing via nano-crystalline textured phases

Journal of applied physics, 2023-07, Vol.134 (3)

2023

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LSE investigation of the thermal effect on band gap energy and thermodynamic parameters of BInGaAs/GaAs Single Quantum Well

Optical materials, 2016-12, Vol.62, p.267-272

2016

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Towards the understanding of the Ti/Al ratio role in solid-state reaction for ohmic contacts on n-GaN

Materials science in semiconductor processing, 2023-05, Vol.158, p.107342, Article 107342

2023

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Platinum redistribution in the Ni0.9Pt0.1/InP system: Impact on solid-state reaction and layer morphology

Materials science in semiconductor processing, 2021-06, Vol.128, p.105731, Article 105731

2021

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Redistribution of phosphorus during Ni0.9Pt0.1-based silicide formation on phosphorus implanted Si substrates

Journal of applied physics, 2018-02, Vol.123 (8)

2018

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Enhanced thermal stability of Ni/GeSn system using pre-amorphization by implantation

Journal of applied physics, 2021-03, Vol.129 (11)

2021

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Redistribution of phosphorus during Ni 0.9 Pt 0.1 -based silicide formation on phosphorus implanted Si substrates

Journal of applied physics, 2018-02, Vol.123 (8)

2018

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Localized state exciton model investigation of B-content effect on optical properties of BGaAs/GaAs epilayers grown by MOCVD

Vacuum, 2016-10, Vol.132, p.10-15

2016

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Impact of Pt on the phase formation sequence, morphology, and electrical properties of Ni(Pt)/Ge0.9Sn0.1 system during solid-state reaction

Journal of applied physics, 2018-08, Vol.124 (8)

2018

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Integration, BEOL, and Thermal Stress Impact on CMOS-Compatible Titanium-Based Contacts for III-V Devices on a 300-mm Platform

IEEE transactions on electron devices, 2020-06, Vol.67 (6), p.2495-2502

2020

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Design and Implementation of a Low Power Wind Turbine Emulator Through the Induction Motor-Permanent Magnet Generator Arrangement

Revista FI-UPTC, 2020-04, Vol.29 (54), p.e10530-e10530

2020

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Phase formation sequence in the Ti/InP system during thin film solid-state reactions

Journal of applied physics, 2017-06, Vol.121 (24)

2017

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Influence of dual Ge/C pre-amorphization implantation on the Ni1−xPtxSi phase nucleation and growth mechanisms

Microelectronic engineering, 2021-05, Vol.244-246, p.1, Article 111571

2021

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7-Levels-Stacked Nanosheet GAA Transistors for High Performance Computing

2020 IEEE Symposium on VLSI Technology, 2020, p.1-2

2020

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Phase formation sequence and cobalt behavior in the Ni0.9 Co0.1 system during the thin film solid-state formation

Microelectronic engineering, 2018-11, Vol.200, p.19-25

2018

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Study of the Ti/InGaAs solid-state reactions: Phase formation sequence and diffusion schemes

Materials science in semiconductor processing, 2020-07, Vol.113, p.105038, Article 105038

2020

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In situ cleaning of InGaAs surfaces prior to low contact resistance metallization

Microelectronic engineering, 2016-04, Vol.156, p.91-96

2016

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Alumina coatings on silica powders by Fluidized Bed Chemical Vapor Deposition from aluminium acetylacetonate

Chemical engineering journal (Lausanne, Switzerland : 1996), 2012-11, Vol.211-212, p.68-76

2012

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Phase formation sequence and cobalt behavior in the Ni^sub 0.9^ Co^sub 0.1^ system during the thin film solid-state formation

Microelectronic engineering, 2018-11, Vol.200, p.19

2018

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Plasma Surface Preparation of III-V Materials: Quasi In-Situ XPS Measurements and Integration Guidelines

ECS transactions, 2019-07, Vol.92 (2), p.73-83

2019

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Analysis of Sn Behavior During Ni/GeSn Solid-State Reaction by Correlated X-ray Diffraction, Atomic Force Microscopy, and Ex-situ/In-situ Transmission Electron Microscopy

ECS transactions, 2020-09, Vol.98 (5), p.365-375

2020

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Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM

A comparative study of C, N and Xe pre-amorphization implantation processes for improving the thermal stability of NiSi films

Phase decomposition in the Ni–InGaAs system at high annealing temperature

Influence of dual Ge/C pre-amorphization implantation on the Ni1−Pt Si phase nucleation and growth mechanisms

Evolution of the Ni0.9Pt0.1/Si system under annealing via nano-crystalline textured phases

LSE investigation of the thermal effect on band gap energy and thermodynamic parameters of BInGaAs/GaAs Single Quantum Well

Towards the understanding of the Ti/Al ratio role in solid-state reaction for ohmic contacts on n-GaN

Platinum redistribution in the Ni0.9Pt0.1/InP system: Impact on solid-state reaction and layer morphology

Redistribution of phosphorus during Ni0.9Pt0.1-based silicide formation on phosphorus implanted Si substrates

Enhanced thermal stability of Ni/GeSn system using pre-amorphization by implantation

Redistribution of phosphorus during Ni 0.9 Pt 0.1 -based silicide formation on phosphorus implanted Si substrates

Localized state exciton model investigation of B-content effect on optical properties of BGaAs/GaAs epilayers grown by MOCVD

Impact of Pt on the phase formation sequence, morphology, and electrical properties of Ni(Pt)/Ge0.9Sn0.1 system during solid-state reaction

Integration, BEOL, and Thermal Stress Impact on CMOS-Compatible Titanium-Based Contacts for III-V Devices on a 300-mm Platform

Design and Implementation of a Low Power Wind Turbine Emulator Through the Induction Motor-Permanent Magnet Generator Arrangement

Phase formation sequence in the Ti/InP system during thin film solid-state reactions

Influence of dual Ge/C pre-amorphization implantation on the Ni1−xPtxSi phase nucleation and growth mechanisms

7-Levels-Stacked Nanosheet GAA Transistors for High Performance Computing

Phase formation sequence and cobalt behavior in the Ni0.9 Co0.1 system during the thin film solid-state formation

Study of the Ti/InGaAs solid-state reactions: Phase formation sequence and diffusion schemes

In situ cleaning of InGaAs surfaces prior to low contact resistance metallization

Alumina coatings on silica powders by Fluidized Bed Chemical Vapor Deposition from aluminium acetylacetonate

Phase formation sequence and cobalt behavior in the Ni^sub 0.9^ Co^sub 0.1^ system during the thin film solid-state formation

Plasma Surface Preparation of III-V Materials: Quasi In-Situ XPS Measurements and Integration Guidelines

Analysis of Sn Behavior During Ni/GeSn Solid-State Reaction by Correlated X-ray Diffraction, Atomic Force Microscopy, and Ex-situ/In-situ Transmission Electron Microscopy

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