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Advanced process technologies: Plasma, direct-write, atmospheric pressure, and roll-to-roll ALD

MRS bulletin, 2011-11, Vol.36 (11), p.907-913

2011

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A comparative study on lanthanide oxide thin films grown by atomic layer deposition

Thin solid films, 2005-01, Vol.472 (1), p.275-281

2005

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Effect of ozone concentration on silicon surface passivation by atomic layer deposited Al2O3

Applied surface science, 2015-12, Vol.357, p.2402-2407

2015

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Structural and Optical Characterization of ZnS Ultrathin Films Prepared by Low-Temperature ALD from Diethylzinc and 1.5-Pentanedithiol after Various Annealing Treatments

Materials, 2019-09, Vol.12 (19), p.3212

2019

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Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors

Thin solid films, 2014-05, Vol.558, p.93-98

2014

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Atomic Layer Deposition of Boron‐Doped Al2O3 Dielectric Films

Advanced materials interfaces, 2023-06, Vol.10 (18), p.n/a

2023

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The Effect of Atomic Layer Deposited Overcoat on Co-Pt-Si/γ-Al2O3 Fischer–Tropsch Catalyst

Catalysts, 2021, Vol.11 (6), p.672

2021

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Oxidative MLD of Conductive PEDOT Thin Films with EDOT and ReCl5 as Precursors

ACS omega, 2021-07, Vol.6 (27), p.17545-17554

2021

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Effect of Co-fed Water on a Co–Pt–Si/γ-Al2O3 Fischer–Tropsch Catalyst Modified with an Atomic Layer Deposited or Molecular Layer Deposition Overcoating

ACS omega, 2022-03, Vol.7 (9), p.7725-7736

2022

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Atomic Layer Deposition Coated Filters in Catalytic Filtration of Gasification Gas

Catalysts, 2021-06, Vol.11 (6), p.688

2021

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Surface Modification of ZnO Nanotubes by Ag and Au Coatings of Variable Thickness: Systematic Analysis of the Factors Leading to UV Light Emission Enhancement

ACS omega, 2024-01, Vol.9 (1), p.1670-1682

2024

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Atomic layer deposition of B2O3 thin films at room temperature

Thin solid films, 2006-08, Vol.514 (1-2), p.145-149

2006

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Processing of Y2O3 Thin Films by Atomic Layer Deposition from Cyclopentadienyl-Type Compounds and Water as Precursors

Chemistry of materials, 2004-07, Vol.16 (15), p.2953-2958

2004

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Molecular Layer Deposition of Pyrrone Thin Films by Oxidative Polymerization

Advanced materials interfaces, 2023-03, Vol.10 (7), p.n/a

2023

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Atomic layer deposition and characterization of biocompatible hydroxyapatite thin films

Thin solid films, 2009-08, Vol.517 (20), p.5819-5824

2009

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Iridium-coated micropore x-ray optics using dry etching of a silicon wafer and atomic layer deposition

Applied optics (2004), 2013-08, Vol.52 (24), p.5949

2013

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Effect of annealing in processing of strontium titanate thin films by ALD

Applied surface science, 2003-04, Vol.211 (1), p.102-112

2003

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In vacuo studies on reaction mechanisms in ALD processes of ruthenium and platinum films

Applied surface science, 2024-03, Vol.648, p.159015, Article 159015

2024

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Atomic layer deposition of lithium containing thin films

Journal of materials chemistry, 2009-01, Vol.19 (46), p.8767-8771

2009

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Modelling atomic layer deposition overcoating formation on a porous heterogeneous catalyst

Physical chemistry chemical physics : PCCP, 2022-08, Vol.24 (34), p.256-2516

2022

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Properties of AlN grown by plasma enhanced atomic layer deposition

Applied surface science, 2011-06, Vol.257 (17), p.7827-7830

2011

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Crystallization of bismuth titanate and bismuth silicate grown as thin films by atomic layer deposition

Journal of crystal growth, 2006-01, Vol.286 (2), p.376-383

2006

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Regularly arranged ZnO/TiO2, HfO2, and ZrO2 core/shell hybrid nanostructures - towards selection of the optimal shell material for efficient ZnO-based UV light emitters

Ceramics international, 2023-10, Vol.49 (19), p.31679-31690

2023

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Ambient pressure x-ray photoelectron spectroscopy setup for synchrotron-based in situ and operando atomic layer deposition research

Review of scientific instruments, 2022-01, Vol.93 (1)

2022

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In vacuo cluster tool for studying reaction mechanisms in atomic layer deposition and atomic layer etching processes

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2023-03, Vol.41 (2)

2023

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Advanced process technologies: Plasma, direct-write, atmospheric pressure, and roll-to-roll ALD

A comparative study on lanthanide oxide thin films grown by atomic layer deposition

Effect of ozone concentration on silicon surface passivation by atomic layer deposited Al2O3

Structural and Optical Characterization of ZnS Ultrathin Films Prepared by Low-Temperature ALD from Diethylzinc and 1.5-Pentanedithiol after Various Annealing Treatments

Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors

Atomic Layer Deposition of Boron‐Doped Al2O3 Dielectric Films

The Effect of Atomic Layer Deposited Overcoat on Co-Pt-Si/γ-Al2O3 Fischer–Tropsch Catalyst

Oxidative MLD of Conductive PEDOT Thin Films with EDOT and ReCl5 as Precursors

Effect of Co-fed Water on a Co–Pt–Si/γ-Al2O3 Fischer–Tropsch Catalyst Modified with an Atomic Layer Deposited or Molecular Layer Deposition Overcoating

Atomic Layer Deposition Coated Filters in Catalytic Filtration of Gasification Gas

Surface Modification of ZnO Nanotubes by Ag and Au Coatings of Variable Thickness: Systematic Analysis of the Factors Leading to UV Light Emission Enhancement

Atomic layer deposition of B2O3 thin films at room temperature

Processing of Y2O3 Thin Films by Atomic Layer Deposition from Cyclopentadienyl-Type Compounds and Water as Precursors

Molecular Layer Deposition of Pyrrone Thin Films by Oxidative Polymerization

Atomic layer deposition and characterization of biocompatible hydroxyapatite thin films

Iridium-coated micropore x-ray optics using dry etching of a silicon wafer and atomic layer deposition

Effect of annealing in processing of strontium titanate thin films by ALD

In vacuo studies on reaction mechanisms in ALD processes of ruthenium and platinum films

Atomic layer deposition of lithium containing thin films

Modelling atomic layer deposition overcoating formation on a porous heterogeneous catalyst

Properties of AlN grown by plasma enhanced atomic layer deposition

Crystallization of bismuth titanate and bismuth silicate grown as thin films by atomic layer deposition

Regularly arranged ZnO/TiO2, HfO2, and ZrO2 core/shell hybrid nanostructures - towards selection of the optimal shell material for efficient ZnO-based UV light emitters

Ambient pressure x-ray photoelectron spectroscopy setup for synchrotron-based in situ and operando atomic layer deposition research

In vacuo cluster tool for studying reaction mechanisms in atomic layer deposition and atomic layer etching processes

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