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Crystallization of amorphous-Si films by flash lamp annealing

Applied surface science, 2005-03, Vol.242 (1), p.185-191

2005

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p-Type doping of SiC by high dose Al implantation—problems and progress

Applied surface science, 2001-12, Vol.184 (1), p.307-316

2001

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Modelling of flash-lamp-induced crystallization of amorphous silicon thin films on glass

Journal of crystal growth, 2005-11, Vol.285 (1), p.249-260

2005

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Efficient p-type doping of 6H-SiC: Flash-lamp annealing after aluminum implantation

Applied physics letters, 1999-02, Vol.74 (7), p.979-981

1999

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On the nature of ion implantation induced dislocation loops in 4H-silicon carbide

Journal of applied physics, 2002-09, Vol.92 (5), p.2501-2505

2002

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Improved 3C-SiC Films Epitaxially Grown on Si by Flash Lamp Processing

Journal of the Electrochemical Society, 2004, Vol.151 (2), p.G136

2004

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Electrical and microstructural properties of highly boron-implantation doped 6H–SiC

Journal of applied physics, 2001-03, Vol.89 (6), p.3162-3167

2001

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Low-resistivity, p -type SiC layers produced by Al implantation and ion-beam-induced crystallization

Applied physics letters, 2002-07, Vol.81 (1), p.70-72

2002

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Optical investigations of β-FeSi2 with and without Cr addition

Journal of applied physics, 2001-11, Vol.90 (10), p.5018-5026

2001

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Microstructural Characterization of 3C-SiC Thin Films Grown by Flash Lamp Induced Liquid Phase Epitaxy

Materials Science Forum, 2005-05, Vol.483-485, p.295-298

2005

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Effect of the Crystallization Conditions on the Epitaxial Relationship of Si Deposited on 3C-SiC(100)

Materials science forum, 2006-10, Vol.527-529, p.1563-1566

2006

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The beneficial role of flash lamp annealing on the epitaxial growth of the 3C–SiC on Si

Applied surface science, 2001-12, Vol.184 (1), p.377-382

2001

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Growth Acceleration in FLASiC Assisted Short Time Liquid Phase Epitaxy by Melt Modification

Materials science forum, 2006-10, Vol.527-529, p.295-298

2006

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Spreading resistance measurements on nanocrystalline SiC produced by ion beam induced crystallisation

Applied surface science, 2001-12, Vol.184 (1), p.209-213

2001

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Structural Characterization of Thin 3C-SiC Films Annealed by the Flash Lamp Process

Materials science forum, 2004-06, Vol.457-460, p.351-354

2004

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High-energy ion-implantation-induced gettering of copper in silicon beyond the projected ion range: The trans-projected-range effect

Journal of applied physics, 2000-11, Vol.88 (10), p.5645-5652

2000

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Flash Lamp Supported Deposition of 3C-SiC (FLASiC) – a Promising Technique to Produce High Quality Cubic SiC Layers

Materials science forum, 2004-01, Vol.457-460, p.175-180

2004

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Epitaxial SiC Formation at the SiO2/Si Interface by C+ Implantation into SiO2 and Subsequent Annealing

Materials Science Forum, 2005-05, Vol.483-485, p.233-236

2005

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Impurity gettering by high-energy ion implantation in silicon beyond the projected range

Applied physics letters, 1999-11, Vol.75 (22), p.3467-3469

1999

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Improved p-Type Conductivity in Heavily Al-Doped SiC by Ion-Beam-Induced Nano-Crystallization

Materials science forum, 2003-09, Vol.433-436, p.395-398

2003

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Nucleation Control in FLASIC Assisted Short Time Liquid Phase Epitaxy by Melt Modification

Materials Science Forum, 2005-05, Vol.483-485, p.213-216

2005

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Flash Lamp Annealing of Implantation Doped p- and n-Type 6H-SiC

Materials science forum, 2001-01, Vol.353-356, p.587-590

2001

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Correlation of electrical and microstructural properties after high dose aluminium implantation into 6H–SiC

Materials science & engineering. B, Solid-state materials for advanced technology, 1999-07, Vol.61, p.363-367

1999

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Ion Implantation Induced Defects in 6H-SiC and their Annealing Behaviour

Materials science forum, 2001-04, Vol.363-365, p.442-444

2001

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Investigation of Thick 3C-SiC Films Re-Grown on Thin 35 nm "Flash Lamp Annealed" 3C-SiC Layers

Materials science forum, 2004-01, Vol.457-460, p.313-316

2004

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Crystallization of amorphous-Si films by flash lamp annealing

p-Type doping of SiC by high dose Al implantation—problems and progress

Modelling of flash-lamp-induced crystallization of amorphous silicon thin films on glass

Efficient p-type doping of 6H-SiC: Flash-lamp annealing after aluminum implantation

On the nature of ion implantation induced dislocation loops in 4H-silicon carbide

Improved 3C-SiC Films Epitaxially Grown on Si by Flash Lamp Processing

Electrical and microstructural properties of highly boron-implantation doped 6H–SiC

Low-resistivity, p -type SiC layers produced by Al implantation and ion-beam-induced crystallization

Optical investigations of β-FeSi2 with and without Cr addition

Microstructural Characterization of 3C-SiC Thin Films Grown by Flash Lamp Induced Liquid Phase Epitaxy

Effect of the Crystallization Conditions on the Epitaxial Relationship of Si Deposited on 3C-SiC(100)

The beneficial role of flash lamp annealing on the epitaxial growth of the 3C–SiC on Si

Growth Acceleration in FLASiC Assisted Short Time Liquid Phase Epitaxy by Melt Modification

Spreading resistance measurements on nanocrystalline SiC produced by ion beam induced crystallisation

Structural Characterization of Thin 3C-SiC Films Annealed by the Flash Lamp Process

High-energy ion-implantation-induced gettering of copper in silicon beyond the projected ion range: The trans-projected-range effect

Flash Lamp Supported Deposition of 3C-SiC (FLASiC) – a Promising Technique to Produce High Quality Cubic SiC Layers

Epitaxial SiC Formation at the SiO2/Si Interface by C+ Implantation into SiO2 and Subsequent Annealing

Impurity gettering by high-energy ion implantation in silicon beyond the projected range

Improved p-Type Conductivity in Heavily Al-Doped SiC by Ion-Beam-Induced Nano-Crystallization

Nucleation Control in FLASIC Assisted Short Time Liquid Phase Epitaxy by Melt Modification

Flash Lamp Annealing of Implantation Doped p- and n-Type 6H-SiC

Correlation of electrical and microstructural properties after high dose aluminium implantation into 6H–SiC

Ion Implantation Induced Defects in 6H-SiC and their Annealing Behaviour

Investigation of Thick 3C-SiC Films Re-Grown on Thin 35 nm "Flash Lamp Annealed" 3C-SiC Layers

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