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Control of temperature distribution to suppress macro-defects in solution growth of 4H-SiC crystals

Journal of crystal growth, 2019-10, Vol.523, p.125151, Article 125151

2019

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Quantitative Analysis of Nanoscale Step Dynamics in High-Temperature Solution-Grown Single Crystal 4H-SiC via In Situ Confocal Laser Scanning Microscope

Crystal growth & design, 2017-05, Vol.17 (5), p.2844-2851

2017

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Effect of aluminum addition on the surface step morphology of 4H–SiC grown from Si–Cr–C solution

Journal of crystal growth, 2015-08, Vol.423, p.45-49

2015

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Growth rate and surface morphology of 4H–SiC crystals grown from Si–Cr–C and Si–Cr–Al–C solutions under various temperature gradient conditions

Journal of crystal growth, 2014-09, Vol.401, p.681-685

2014

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Application of Defect Conversion Layer by Solution Growth for Reduction of TSDs in 4H-SiC Bulk Crystals by PVT Growth

Materials science forum, 2019-07, Vol.963, p.71-74

2019

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Influence of Additives on Surface Smoothness and Polytype Stability in Solution Growth of n-Type 4H-SiC

Materials science forum, 2018-06, Vol.924, p.55-59

2018

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Characterization of Si-added aluminum oxide (AlSiO) films for power devices

Applied surface science, 2010, Vol.256 (6), p.1803-1806

2010

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4H-SiC Growth from Si-Cr-C Solution under Al and N Co-Doping Conditions

Materials science forum, 2015-06, Vol.821-823, p.9-13

2015

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Growth Rate and Surface Morphology of 4H-SiC Single Crystal Grown under Various Supersaturations Using Si-C Solution

Materials science forum, 2013-01, Vol.740-742, p.23-26

2013

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Influence of inserting AlN between AlSiON and 4H–SiC interface for the MIS structure

Applied surface science, 2011-08, Vol.257 (20), p.8307-8310

2011

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Control of Void Formation in 4H-SiC Solution Growth

Materials science forum, 2012-05, Vol.717-720, p.57-60

2012

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Growth of 4H-SiC in Current-Controlled Liquid Phase Epitaxy

Materials science forum, 2013-01, Vol.740-742, p.3-6

2013

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Modulation of Growth Rate by Electric Current in Liquid-Phase Epitaxy of 4H-SiC

Japanese Journal of Applied Physics, 2013-08, Vol.52 (8), p.085503-085503-6

2013

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Reduction of threading screw dislocations in 4H-SiC crystals by a hybrid method with solution growth and physical vapor transport growth

Journal of crystal growth, 2021-08, Vol.568-569, p.126189, Article 126189

2021

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Influence of moisture on BCN (low- K) film for interconnection reliability

Diamond and related materials, 2008-04, Vol.17 (4), p.628-632

2008

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Effect of nitrogen doping on the properties of AlSiO film for wide bandgap semiconductors

Applied surface science, 2010-12, Vol.257 (5), p.1437-1440

2010

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Morphological stability of 4H-SiC crystals in solution growth on {0001} and {11̅0m} surfaces

Journal of crystal growth, 2017-06, Vol.468, p.883-888

2017

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Low-Temperature and Rapid Oxidation of GaN Surface by Saturated Water Vapor at High Pressure

Japanese Journal of Applied Physics, 2009-04, Vol.48 (4S), p.4

2009

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Modification of the surface morphology of 4H-SiC by addition of Sn and Al in solution growth with SiCr solvents

Journal of crystal growth, 2017-01, Vol.458, p.37-43

2017

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Very Smooth SiO2/SiC Interface Formed by Supercritical Water Oxidation at Low Temperature

Jpn J Appl Phys, 2010-01, Vol.49 (4), p.04DF18-04DF18-5

2010

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Properties of LaAlO Film after Waterless Process Using Organic Solvent Containing Anhydrous Hydrofluoric Acid

Japanese Journal of Applied Physics, 2010-04, Vol.49 (4), p.04DA13-04DA13-4

2010

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Variations of macrostep structures with solvent compositions in 4H-SiC solution growth

Journal of the Japanese Association for Crystal Growth, 2018, Vol.45(2), pp.3-45-2-02

2018

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Change in Surface Morphology by Addition of Impurity Elements in 4H-SiC Solution Growth with Si Solvent

Materials science forum, 2015-06, Vol.821-823, p.14-17

2015

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Low-temperature oxidation of SiC surfaces by supercritical water oxidation

Applied surface science, 2010-09, Vol.256 (22), p.6512-6517

2010

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Growth and properties of YAlO film synthesized by RF magnetron sputtering

Applied surface science, 2009-02, Vol.255 (9), p.5021-5024

2009

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Control of temperature distribution to suppress macro-defects in solution growth of 4H-SiC crystals

Quantitative Analysis of Nanoscale Step Dynamics in High-Temperature Solution-Grown Single Crystal 4H-SiC via In Situ Confocal Laser Scanning Microscope

Effect of aluminum addition on the surface step morphology of 4H–SiC grown from Si–Cr–C solution

Growth rate and surface morphology of 4H–SiC crystals grown from Si–Cr–C and Si–Cr–Al–C solutions under various temperature gradient conditions

Application of Defect Conversion Layer by Solution Growth for Reduction of TSDs in 4H-SiC Bulk Crystals by PVT Growth

Influence of Additives on Surface Smoothness and Polytype Stability in Solution Growth of n-Type 4H-SiC

Characterization of Si-added aluminum oxide (AlSiO) films for power devices

4H-SiC Growth from Si-Cr-C Solution under Al and N Co-Doping Conditions

Growth Rate and Surface Morphology of 4H-SiC Single Crystal Grown under Various Supersaturations Using Si-C Solution

Influence of inserting AlN between AlSiON and 4H–SiC interface for the MIS structure

Control of Void Formation in 4H-SiC Solution Growth

Growth of 4H-SiC in Current-Controlled Liquid Phase Epitaxy

Modulation of Growth Rate by Electric Current in Liquid-Phase Epitaxy of 4H-SiC

Reduction of threading screw dislocations in 4H-SiC crystals by a hybrid method with solution growth and physical vapor transport growth

Influence of moisture on BCN (low- K) film for interconnection reliability

Effect of nitrogen doping on the properties of AlSiO film for wide bandgap semiconductors

Morphological stability of 4H-SiC crystals in solution growth on {0001} and {11̅0m} surfaces

Low-Temperature and Rapid Oxidation of GaN Surface by Saturated Water Vapor at High Pressure

Modification of the surface morphology of 4H-SiC by addition of Sn and Al in solution growth with SiCr solvents

Very Smooth SiO2/SiC Interface Formed by Supercritical Water Oxidation at Low Temperature

Properties of LaAlO Film after Waterless Process Using Organic Solvent Containing Anhydrous Hydrofluoric Acid

Variations of macrostep structures with solvent compositions in 4H-SiC solution growth

Change in Surface Morphology by Addition of Impurity Elements in 4H-SiC Solution Growth with Si Solvent

Low-temperature oxidation of SiC surfaces by supercritical water oxidation

Growth and properties of YAlO film synthesized by RF magnetron sputtering

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