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Micromachines (Basel), 2020-03, Vol.11 (3), p.267
2020
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New journal of physics, 2016-10, Vol.18 (10), p.103036
2016
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Journal of microelectromechanical systems, 2016-08, Vol.25 (4), p.652-661
2016
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Micromachines (Basel), 2018-06, Vol.9 (6), p.275
2018
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Electronics & communications in Japan. Part 1, Communications, 2014-03, Vol.97 (3), p.60-67
2014
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IEEJ transactions on electrical and electronic engineering, 2007-05, Vol.2 (3), p.289-294
2007
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Japanese Journal of Applied Physics, 2004-06, Vol.43 (6S), p.4041
2004
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Design, Fabrication, and Operation of Two-Dimensional Conveyance System With Ciliary Actuator Arrays
2009
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Japanese Journal of Applied Physics, 2004-05, Vol.43 (5R), p.2742
2004
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Journal of microelectromechanical systems, 1993-12, Vol.2 (4), p.146-150
1993
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IEEJ transactions on electrical and electronic engineering, 2007-05, Vol.2 (3), p.xi-xii
2007
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Sensors update, 1999-11, Vol.6 (1), p.333-358
1999
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IEEE transactions on magnetics, 1999-03, Vol.35 (2), p.1006-1010
1999
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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, 2007, p.675-678
2007
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2018 IEEE Micro Electro Mechanical Systems (MEMS), 2018, p.297-300
2018
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Journal of nuclear science and technology, 2004-03, Vol.41 (sup4), p.144-147
2004
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IEEE transactions on applied superconductivity, 2003-06, Vol.13 (2), p.653-656
2003
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2010 First Workshop on Hardware and Software Implementation and Control of Distributed MEMS, 2010, p.6-10
2010
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2010 First Workshop on Hardware and Software Implementation and Control of Distributed MEMS, 2010, p.1-5
2010
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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, 2007, p.1155-1158
2007
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2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), 2012, p.1281-1284
2012
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2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS), 2007, p.35-38
2007
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18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005, 2005, p.335-338
2005
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The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05, 2005, Vol.1, p.31-34 Vol. 1
2005
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The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05, 2005, Vol.1, p.680-683 Vol. 1
2005
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