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Quantitative evaluation of plasma-damaged SiN/Si structures using bias-dependent admittance analysis

Journal of applied physics, 2022-04, Vol.131 (13)

2022

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Spectroscopic ellipsometry characterization of boron nitride films synthesized by a reactive plasma-assisted coating method

Applied physics letters, 2022-01, Vol.120 (3)

2022

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Investigation of spatial and energy profiles of plasma process-induced latent defects in Si substrate using capacitance-voltage characteristics

Journal of physics. D, Applied physics, 2019-11, Vol.52 (45)

2019

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Investigation of discharge mechanisms in helium plasma jet at atmospheric pressure by laser spectroscopic measurements

Journal of physics. D, Applied physics, 2010-03, Vol.43 (9), p.095201-095201

2010

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Characterization of the distribution of defects introduced by plasma exposure in Si substrate

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2019-01, Vol.37 (1)

2019

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Absorption spectroscopy using interference between optical frequency comb and single-wavelength laser

Applied physics letters, 2012-07, Vol.101 (5), p.51105

2012

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Improvement of the plasma‐induced defect generation model in Si substrates and the optimization design framework

Plasma processes and polymers, 2019-09, Vol.16 (9), p.n/a

2019

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Electron number density measurements in nanosecond repetitively pulsed discharges in water vapor at atmospheric pressure

Plasma sources science & technology, 2020-02, Vol.29 (2), p.25017

2020

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Characterization of surface modification mechanisms for boron nitride films under plasma exposure

Surface & coatings technology, 2019-11, Vol.377, p.124854, Article 124854

2019

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Dynamics of cavitation bubbles formed by pulsed-laser ablation plasmas near the critical point of CO2

Journal of physics. D, Applied physics, 2018-10, Vol.52 (2)

2018

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Laser diagnostics on atmospheric pressure discharge plasmas, including cryoplasmas, in environments around room and cryogenic temperature

Journal of physics. D, Applied physics, 2017-03, Vol.50 (16), p.165201

2017

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Application of phase-modulated dispersion interferometry to electron-density diagnostics of high-pressure plasma

Journal of physics. D, Applied physics, 2014-07, Vol.47 (26), p.1-5

2014

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Combined spectroscopic methods for electron-density diagnostics inside atmospheric-pressure glow discharge using He/N2 gas mixture

Journal of physics. D, Applied physics, 2011-03, Vol.44 (11), p.115203

2011

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Microscopic heterodyne interferometry for determination of electron density in high-pressure microplasma

Plasma sources science & technology, 2014-12, Vol.23 (6), p.64007-9

2014

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Pulsed laser ablation plasmas generated in CO2 under high-pressure conditions up to supercritical fluid

Applied physics letters, 2012-11, Vol.101 (22)

2012

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Atmospheric pressure synthesis of diamondoids by plasmas generated inside a microfluidic reactor

Diamond and related materials, 2015-10, Vol.59, p.40-46

2015

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Characterization of Plasma Process-Induced Low-Density Defect Creation by Lateral Junction Leakage

IEEE journal of the Electron Devices Society, 2022, Vol.10, p.769-777

2022

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Dynamics of pulsed laser ablation in high-density carbon dioxide including supercritical fluid state

Journal of applied physics, 2013-10, Vol.114 (14)

2013

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Laser absorption spectroscopy diagnostics of helium metastable atoms generated in dielectric barrier discharge cryoplasmas

Japanese Journal of Applied Physics, 2015-10, Vol.54 (10), p.106101

2015

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Interaction between Dielectric Barrier Discharge and Positive Streamer in Helium Plasma Jet at Atmospheric Pressure

Japanese Journal of Applied Physics, 2010-10, Vol.49 (10), p.106001-106001-6

2010

Volltextzugriff (PDF)

Enhancement of visible He2 emission by infrared laser excitation of He metastable atoms in atmospheric-pressure plasma jet

Journal of physics. D, Applied physics, 2011-02, Vol.44 (4), p.042001-042001

2011

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Electron density change of atmospheric-pressure plasmas in helium flow depending on the oxygen/nitrogen ratio of the surrounding atmosphere

Japanese Journal of Applied Physics, 2016-06, Vol.55 (6), p.66101

2016

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Hydrazine generation for the reduction process using small-scale plasmas in an argon/ammonia mixed gas flow

Plasma sources science & technology, 2013-06, Vol.22 (3), p.32003-1-4

2013

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Propagation of a Dielectric Barrier Discharge in a Multichannel Mixing Chip Microreactor

IEEE transactions on plasma science, 2014-10, Vol.42 (10), p.2358-2359

2014

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Measurement of electron density in atmospheric pressure small-scale plasmas using CO2-laser heterodyne interferometry

Plasma sources science & technology, 2009-08, Vol.18 (3), p.035013-035013 (8)

2009

Volltextzugriff (PDF)

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Quantitative evaluation of plasma-damaged SiN/Si structures using bias-dependent admittance analysis

Spectroscopic ellipsometry characterization of boron nitride films synthesized by a reactive plasma-assisted coating method

Investigation of spatial and energy profiles of plasma process-induced latent defects in Si substrate using capacitance-voltage characteristics

Investigation of discharge mechanisms in helium plasma jet at atmospheric pressure by laser spectroscopic measurements

Characterization of the distribution of defects introduced by plasma exposure in Si substrate

Absorption spectroscopy using interference between optical frequency comb and single-wavelength laser

Improvement of the plasma‐induced defect generation model in Si substrates and the optimization design framework

Electron number density measurements in nanosecond repetitively pulsed discharges in water vapor at atmospheric pressure

Characterization of surface modification mechanisms for boron nitride films under plasma exposure

Dynamics of cavitation bubbles formed by pulsed-laser ablation plasmas near the critical point of CO2

Laser diagnostics on atmospheric pressure discharge plasmas, including cryoplasmas, in environments around room and cryogenic temperature

Application of phase-modulated dispersion interferometry to electron-density diagnostics of high-pressure plasma

Combined spectroscopic methods for electron-density diagnostics inside atmospheric-pressure glow discharge using He/N2 gas mixture

Microscopic heterodyne interferometry for determination of electron density in high-pressure microplasma

Pulsed laser ablation plasmas generated in CO2 under high-pressure conditions up to supercritical fluid

Atmospheric pressure synthesis of diamondoids by plasmas generated inside a microfluidic reactor

Characterization of Plasma Process-Induced Low-Density Defect Creation by Lateral Junction Leakage

Dynamics of pulsed laser ablation in high-density carbon dioxide including supercritical fluid state

Laser absorption spectroscopy diagnostics of helium metastable atoms generated in dielectric barrier discharge cryoplasmas

Interaction between Dielectric Barrier Discharge and Positive Streamer in Helium Plasma Jet at Atmospheric Pressure

Enhancement of visible He2 emission by infrared laser excitation of He metastable atoms in atmospheric-pressure plasma jet

Electron density change of atmospheric-pressure plasmas in helium flow depending on the oxygen/nitrogen ratio of the surrounding atmosphere

Hydrazine generation for the reduction process using small-scale plasmas in an argon/ammonia mixed gas flow

Propagation of a Dielectric Barrier Discharge in a Multichannel Mixing Chip Microreactor

Measurement of electron density in atmospheric pressure small-scale plasmas using CO2-laser heterodyne interferometry

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