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Microsystem technologies : sensors, actuators, systems integration, 2010-05, Vol.16 (5), p.847-853
2010
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Microelectronic engineering, 2014-07, Vol.123, p.23-27
2014
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Microelectronic engineering, 2017-08, Vol.180, p.81-85
2017
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Microelectronic engineering, 2004-06, Vol.73, p.196-201
2004
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2015 30th Annual ACM/IEEE Symposium on Logic in Computer Science, 2015, p.511-522
2015
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2013-11, Vol.31 (6), p.6
2013
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Journal of microelectromechanical systems, 2011-08, Vol.20 (4), p.794-796
2011
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Microsystem technologies, 2014-10, Vol.20 (10-11), p.1773-1781
2014
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Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2016-11, Vol.34 (6)
2016
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2008-03, Vol.26 (2), p.458-480
2008
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Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2018-03, Vol.36 (2)
2018
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Journal of micromechanics and microengineering, 2001-07, Vol.11 (4), p.428-433
2001
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Microsystem technologies, 2008-11, Vol.14 (12), p.1887-1894
2008
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Microengineering of Metals and Ceramics, 2005, p.579-603
2005
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Journal of micromechanics and microengineering, 2020-09, Vol.30 (9), p.95012
2020
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Micro and Nano Engineering, 2022-08, Vol.16, p.100144, Article 100144
2022
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- Journal Of Vacuum Science And Technology. B, Nanotechnology & Microelectronics
- Microelectronic Engineering
- Microsystem Technologies : Sensors, Actuators, Systems Integration
- Journal Of Micromechanics And Microengineering
- Journal Of Vacuum Science & Technology B: Microelectronics And Nanometer Structures
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- Microsystem Technologies
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- Journal Of Vacuum Science & Technology B: Microelectronics And Nanometer Structures Processing, Measurement, And Phenomena
- Micro And Nano Engineering