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Microsystem technologies : sensors, actuators, systems integration, 2010-05, Vol.16 (5), p.847-853
2010
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Advanced functional materials, 2016-09, Vol.26 (35), p.6402-6417
2016
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Advanced functional materials, 2021-05, Vol.31 (19), p.n/a
2021
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Advanced functional materials, 2023-02, Vol.33 (6), p.n/a
2023
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Small (Weinheim an der Bergstrasse, Germany), 2023-10, Vol.19 (40), p.e2300509-e2300509
2023
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Small (Weinheim an der Bergstrasse, Germany), 2024-02, p.e2310665-e2310665
2024
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2013-11, Vol.31 (6), p.6
2013
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Journal of microelectromechanical systems, 2011-08, Vol.20 (4), p.794-796
2011
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Advanced materials (Weinheim), 2019-06, Vol.31 (26), p.e1900985-n/a
2019
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Advanced materials (Weinheim), 2012-01, Vol.24 (3), p.375-380
2012
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Microsystem technologies, 2014-10, Vol.20 (10-11), p.1773-1781
2014
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Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2016-11, Vol.34 (6)
2016
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2008-03, Vol.26 (2), p.458-480
2008
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Small (Weinheim an der Bergstrasse, Germany), 2023-04, Vol.19 (14), p.e2205412-n/a
2023
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Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2018-03, Vol.36 (2)
2018
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Nanotechnology, 2005-05, Vol.16 (5), p.S171-S175
2005
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Advanced functional materials, 2015-11, Vol.25 (42), p.6679-6688
2015
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Journal of micromechanics and microengineering, 2001-07, Vol.11 (4), p.428-433
2001
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Microsystem technologies, 2008-11, Vol.14 (12), p.1887-1894
2008
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Advanced materials (Weinheim), 2018-05, Vol.30 (22), p.e1707100-n/a
2018
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Nanotechnology, 2016-09, Vol.27 (39)
2016
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Journal of micromechanics and microengineering, 2020-09, Vol.30 (9), p.95012
2020
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Journal of nanoparticle research : an interdisciplinary forum for nanoscale science and technology, 2013-10, Vol.15 (10), p.1-24, Article 2021
2013
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