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Structural properties and epitaxial relation of cubic rock salt ScxAl1−xN/ScN/Si
Ist Teil von
Journal of applied physics, 2023-10, Vol.134 (15)
Ort / Verlag
Melville: American Institute of Physics
Erscheinungsjahr
2023
Quelle
AIP Journals
Beschreibungen/Notizen
ScN in the rock salt structure is a well-investigated material due to its desirable properties like the high hardness or large thermal conductivity. Recent computations by Adamski et al. [Appl. Phys. Lett. 115, 232103 (2019)] showed that ScN/GaN heterostructures exhibit an outstanding polarization gradient which would be beneficial for polarization induced electron gases. The pseudobinary semiconductor Sc
xAl
1
−
xN, when maintaining the cubic rock salt structure, could be beneficial for tailoring the polarization gradient using the Sc dependency of material properties. The structural properties of rs-Sc
xAl
1
−
xN are not fully discovered yet, thus in this work, DC-magnetron sputtered cubic rock salt Sc
xAl
1
−
xN thin films with
0.55
<
x
<
1.00 were grown and analyzed on ScN(111)/Si(111). The epitaxial relation of ScN(111) thin films on the Si(111) substrate is determined to be ScN[110]
∥ Si[100]. Furthermore, concentration dependent properties like the lattice parameter of Sc
xAl
1
−
xN were measured [a(ScN) = 4.50 Å, a(Sc0.55Al0.45N) = 4.30 Å] and the stress
σ within the layers was determined. The crystal quality was evaluated using
ω-scans, revealing
FWHM
=
1.14
° for Sc0.95Al0.05N. The diameters of the columns were determined by atomic force microscopy and scanning electron microscopy and they are range from 34 to 59 nm for
0.55
<
x
<
1.00. At
x
=
0.55, Sc
xAl
1
−
xN columns in the hexagonal wurtzite as well as cubic rock salt structure were detected. This information about the structural specifications of Sc
xAl
1
−
xN in the rock salt structure forms the basis for further investigations and experimental confirmation of the electric properties of ScN/GaN heterostructures or even a Sc
xAl
1
−
xN/GaN based approach for improved structures for high-electron-mobility transistors.