Details

Autor(en) / Beteiligte

• Gao, Jing
• Müller, Wolfgang F O
• Greiner, Felix
• Eicher, Dirk
• Weiland, Thomas
• Schlaak, Helmut F

Titel

Combined simulation of a micro permanent magnetic linear contactless displacement sensor

Ist Teil von

• Sensors (Basel, Switzerland), 2010-09, Vol.10 (9), p.8424-8436

Ort / Verlag

Switzerland: MDPI AG

Erscheinungsjahr

2010

Link zum Volltext

Quelle

EZB Electronic Journals Library

Beschreibungen/Notizen

• The permanent magnetic linear contactless displacement (PLCD) sensor is a new type of displacement sensor operating on the magnetic inductive principle. It has many excellent properties and has already been used for many applications. In this article a Micro-PLCD sensor which can be used for microelectromechanical system (MEMS) measurements is designed and simulated with the CST EM STUDIO(®) software, including building a virtual model, magnetostatic calculations, low frequency calculations, steady current calculations and thermal calculations. The influence of some important parameters such as air gap dimension, working frequency, coil current and eddy currents etc. is studied in depth.