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Sensors and actuators. A, Physical, 1992-04, Vol.32 (1), p.321-325
Ort / Verlag
Lausanne: Elsevier B.V
Erscheinungsjahr
1992
Link zum Volltext
Quelle
Elsevier Journal Backfiles on ScienceDirect (DFG Nationallizenzen)
Beschreibungen/Notizen
Interdigital capacitors covered with a gas-sensitive layer are suitable for the integration of gas sensors with microelectronic technologies. They can be temperature stabilized by mounting them on a heated membrane. Usually one faces the problem of significant temperature gradients across the membrane for large-area sensors. In this work a heater arrangement capable of maintaining an almost even temperature distribution on the heated membrane is presented. An analytical approach and finite-element simulations are used to estimate heating power distribution for a square-shaped membrane. A test chip was designed and fabricated. The fabrication process is fully compatible with standard bipolar processing.