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Heuristic scheduling policies for a semiconductor wafer fabrication facility: minimizing variation of cycle times
Ist Teil von
International journal of advanced manufacturing technology, 2013-07, Vol.67 (1-4), p.171-180
Ort / Verlag
London: Springer-Verlag
Erscheinungsjahr
2013
Link zum Volltext
Quelle
Alma/SFX Local Collection
Beschreibungen/Notizen
This paper presents heuristic scheduling policies for semiconductor wafer fabrication facilities. The proposed heuristic scheduling policies include the advanced operation due date (OPNDD) for a sequence control policy and the adaptive constant work-in-process (CONWIP) for an input release control policy. The objective of the proposed scheduling policies is to reduce the variation of cycle times in the wafer fab. The advanced OPNDD sets the higher priority to the front opening unified pod (FOUP) with the smallest operation due date that is computed using a generalized stochastic Petri net model, and at the same time regulates the queue lengths of the FOUPs in each stoker by preventing excessive queue lengths in bottleneck workstations. The adaptive CONWIP controls dynamically the input release time of FOUPs using the adaptive WIP level according to the current status of the wafer fab. The simulation experiments show that the proposed scheduling method is efficient in reducing the variation of cycle times.