Details

Autor(en) / Beteiligte

• Sun, Yi-Zhi
• Ding, Wei
• Wang, Bin-Bin
• Salas-Montiel, Rafael
• Blaize, Sylvain
• Bachelot, Renaud
• Fan, Zhong-Wei
• Feng, Li-Shuang

Titel

Standing-wave spectrometry in silicon nano-waveguides using reflection-based near-field scanning optical microscopyProject supported by National Key R&D Program of China (Grant No. 2017YFA0303800), National Natural Science Foundation of China (Grant No. 61575218), and Defense Industrial Technology Development Program, China (Grant No. JCKY201601C006)

Ist Teil von

• Chinese physics B, 2019-01, Vol.28 (1)

Ort / Verlag

Chinese Physical Society and IOP Publishing Ltd

Erscheinungsjahr

2019

Link zum Volltext

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• Utilizing reflection-based near-field scanning optical microscopy (NSOM) to image and analyze standing-wave patterns, we present a characterization technique potentially suitable for complex photonic integrated circuits. By raster scanning along the axis of a straight nano-waveguide in tapping mode and sweeping wavelength, detailed information of propagating waves in that waveguide has been extracted from analyses in both space and wavelength domains. Our technique needs no special steps for phase stabilization, thus allowing long-duration and environment-insensitive measurements. As a proof-of-concept test, in a silicon single-mode waveguide with a few of etched holes, the locations and reflection strengths of the inner defects have been quantified. The measurement uncertainty of the reflection amplitude is less than 25% at current stage. Our technique paves the way for non-destructively diagnosing photonic circuits on a chip with sub-wavelength spatial resolution and detailed information extraction.