Sie befinden Sich nicht im Netzwerk der Universität Paderborn. Der Zugriff auf elektronische Ressourcen ist gegebenenfalls nur via VPN oder Shibboleth (DFN-AAI) möglich.
mehr Informationen...
Sub-Nanometer Heterodyne Interferometry and Its Application in Dilatometry and Industrial Metrology
Ist Teil von
International journal of optomechatronics, 2009-09, Vol.3 (3), p.187-200
Ort / Verlag
Taylor & Francis Group
Erscheinungsjahr
2009
Link zum Volltext
Quelle
EZB Electronic Journals Library
Beschreibungen/Notizen
In this article, we present the current status of our high-sensitivity compact heterodyne interferometer and highlight its application in high-accuracy dilatometry and industrial surface metrology. The linear coefficient of thermal expansion (CTE) of dimensionally highly stable carbon-fiber reinforced plastic (CFRP) was measured with 10
−7
K
−1
accuracy. A very compact and quasi-monolithic interferometer setup is currently developed utilizing ultra-low expansion glass material. We present first investigations on the corresponding integration technologies, hydroxide-catalysis bonding and adhesive bonding. For high resolution 3-D profilometry and surface property measurements, a low-noise actuator will be implemented in the interferometer, which enables a scan of the measurement beam over the surface under investigation.