Kaneko, M; Nakajima, M; Jin, Q; Kimoto, T
Experimental Study on Short-Channel Effects in Double-Gate Silicon Carbide JFETs
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  • IEEE transactions on electron devices, 2020-10, Vol.67 (10), p.4538-4540
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Short-channel effects (SCEs) in double-gate silicon carbide junction field-effect transistors (JFETs) fully fabricated by ion implantation are experimentally investigated. The threshold voltage shift, drain-induced barrier lowering, and subthreshold slope degradation are clearly observed in the fabricated p- and n-JFETs. The SCEs are quantitatively evaluated by comparing with the theoretical values obtained by solving a 2-D Poisson equation, which shows good agreement with experiments. The dominant parameter for the SCEs in JFETs is the ratio of the channel length (<inline-formula> <tex-math notation="LaTeX">{L} </tex-math></inline-formula>) to the channel thickness (<inline-formula> <tex-math notation="LaTeX">{a} </tex-math></inline-formula>), and the device scaling rule to avoid the SCEs is estimated to be <inline-formula> <tex-math notation="LaTeX">{L}/{a} > {3} </tex-math></inline-formula>.

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