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Details

Autor(en) / Beteiligte
Titel
Spatial-Temporal Trajectory Redesign for Dual-Stage Nanopositioning Systems With Application in AFM
Ist Teil von
  • IEEE/ASME transactions on mechatronics, 2020-04, Vol.25 (2), p.558-569
Ort / Verlag
IEEE
Erscheinungsjahr
2020
Link zum Volltext
Quelle
IEL
Beschreibungen/Notizen
  • This article focuses on trajectory redesign for dual-stage nanopositioning systems, where speed, range, and resolution are considered. Dual-stage nanopositioning systems are becoming increasingly popular due to their unique ability to achieve long-range and high-speed operation. Conventional trajectory assignment methods for dual-stage systems commonly consider frequency characteristics of the actuators, a process that can inappropriately allocate short-range, low-frequency components of a reference signal. A new systematic range-and-temporal-based trajectory-redesign process is presented, where the desired trajectory is first split based on achievable positioning bandwidth, and then, split spatially based on the achievable range and positioning resolution. Inversion-based feedforward control techniques are then used to compensate for the dynamic and hysteretic behaviors of a piezo-based prototype dual-stage positioner; this control architecture is selected to emphasize improvements achieved through the new trajectory-redesign method, as well as allow for implementation onto platforms with minimal sensing capabilities. Simulations and atomic force microscope experiments are included to demonstrate the success of this redesign procedure compared to approaches that consider frequency or range alone.
Sprache
Englisch
Identifikatoren
ISSN: 1083-4435
eISSN: 1941-014X
DOI: 10.1109/TMECH.2020.2971755
Titel-ID: cdi_ieee_primary_8984256

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