Details

Autor(en) / Beteiligte

• Smith, S. W.
• Kitahara, A. R.
• Rodriguez, M. A.
• Henry, M. D.
• Brumbach, M. T.
• Ihlefeld, J. F.

Titel

Pyroelectric response in crystalline hafnium zirconium oxide (Hf1- x Zr x O2) thin films

Ist Teil von

• Applied physics letters, 2017-02, Vol.110 (7)

Ort / Verlag

Melville: American Institute of Physics

Erscheinungsjahr

2017

Quelle

American Institute of Physics

Beschreibungen/Notizen

• Pyroelectric coefficients were measured for 20 nm thick crystalline hafnium zirconium oxide (Hf1- x Zr x O2) thin films across a composition range of 0 ≤ x ≤ 1. Pyroelectric currents were collected near room temperature under zero applied bias and a sinusoidal oscillating temperature profile to separate the influence of non-pyroelectric currents. The pyroelectric coefficient was observed to correlate with zirconium content, increased orthorhombic/tetragonal phase content, and maximum polarization response. The largest measured absolute value was 48 μCm−2 K−1 for a composition with x = 0.64, while no pyroelectric response was measured for compositions which displayed no remanent polarization (x = 0, 0.91, and 1).