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•Multislice DPC image simulations of SrTiO3 [001] and Si [110].•Atomic resolution DPC imaging of Si [110].•High sensitivity of DPC imaging to lens aberrations, specimen thickness and tilt.•Scattergram analysis reveals residual lens aberrations and specimen misalignment.•Scattering and diffraction contrast reduce DPC signal magnitude.
Differential phase contrast (DPC) imaging in scanning transmission electron microscopy (STEM) allows for measuring electric and magnetic fields in solids on scales ranging from picometres to micrometres. The DPC technique mainly uses the direct beam, which is deflected by the electric and magnetic fields of the specimen and measured with a beam position sensitive detector. The beam deflection and thus the DPC signal is strongly influenced by specimen thickness, specimen tilt and lens aberrations. Understanding these influences is critical for a solid interpretation and quantification of contrasts in DPC images. To this end, the present study employs DPC-STEM image simulations of SrTiO3 [001] at atomic resolution to analyse the influence of lens aberrations, specimen tilt and thickness and also to give a guideline for the detection of parameters affecting the contrast by performing an analysis of associated scattergrams. Simulations are obtained using the multislice algorithm implemented in the Dr. Probe software with conditions corresponding to a JEOL ARM200F microscope equipped with an octa-segmented annular detector, but results should be similar for other microscopes. Simulations show that due to a non-rigid shift of the detected intensity distribution correct values of projected potentials of specimens thicker than one unit-cell cannot be determined. Regarding the impact of residual lens aberrations, it is found that the shape of the lens aberration phase function determines the symmetry and features in the DPC image. Specimen tilt leads to an elongation of features perpendicular to the tilt axis. The results are confirmed by comparing simulated with experimental DPC images of Si [110] yielding good agreement. Overall, a high sensitivity of DPC-STEM imaging to lens aberrations, specimen tilt and diffraction effects is evidenced.