Details

Autor(en) / Beteiligte

• Neri, Fortunato
• Mondio, Guglielmo
• Mezzasalma, Angela Maria
• Fazio, Enza
• Trusso, Sebastiano
• Fazio, Barbara

Titel

An investigation of the electronic and structural properties of pulsed laser-deposited a-C films

Ist Teil von

• Thin solid films, 2001-11, Vol.398, p.233-237

Ort / Verlag

Elsevier B.V

Erscheinungsjahr

2001

Link zum Volltext

Quelle

Elsevier Journal Backfiles on ScienceDirect (DFG Nationallizenzen)

Beschreibungen/Notizen

• The electronic and structural properties of amorphous carbon films have been studied by means of Raman and X-ray photoelectron spectroscopy. The films were deposited, under vacuum, by KrF excimer laser ablation of graphite targets. Both the substrate temperature and laser fluence were increased up to 900 K and 15 J cm −2, respectively. The Raman spectra of the films deposited at room temperature showed the presence of a broad band peaked at nearly 1550 cm −1 with a shoulder in the 1300–1400 cm −1 region, with an sp 3 content ranging from 60 to 70%. Upon varying the laser fluence, only slight modifications in the Raman spectra were observed. On the contrary, increasing the substrate temperature increased the low-frequency component, suggesting an increase in the sp 2 content. This result is also supported by the lineshape modifications observed for the C 1s photoemission peak and by a possible reduction in the film density.