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Thermal Fatigue Behavior of Silicon-Carbide-Doped Silver Microflake Sinter Joints for Die Attachment in Silicon/Silicon Carbide Power Devices
Ist Teil von
Journal of electronic materials, 2017-02, Vol.46 (2), p.1055-1060
Ort / Verlag
New York: Springer US
Erscheinungsjahr
2017
Quelle
Alma/SFX Local Collection
Beschreibungen/Notizen
We studied the thermal fatigue behavior of submicron silicon carbide particle (SiC
p
)-doped silver (Ag) microflake sinter joints for die attachment in next-generation power devices. Si dummy chips and direct bonded copper substrates with various metallization schemes were bonded using SiC
p
-doped Ag microflakes under mild conditions (250°C, 30 min, 0.4 MPa). The SiC
p
was distributed homogeneously in the porous Ag network and inhibited morphological evolution during thermal cycling tests. The shear strength of as-sintered pure Ag and SiC
p
-added joints was ∼50 MPa and 35 MPa, respectively. Thermal cycling tests from −40°C to 250°C were conducted for up to 1000 cycles (hours) to characterize the thermostability of the bonded joints. After 1000 cycles, joints with and without SiC
p
experienced bonding degradation, with shear strength of ∼25 MPa and 20 MPa, respectively. Thus, after 1000 cycles, the shear strength of pure Ag and SiC
p
-doped joints decreased by 58% and 42%, respectively, compared with their maximum value. Coarsening of porous Ag occurred in pure Ag joints. SiC
p
addition inhibited morphological evolution of SiC
p
-doped joints during thermal cycling. However, vertical cracks generated by thermal stress were observed in joints both with and without SiC
p
, which may limit long-term reliability.