Details

Autor(en) / Beteiligte

• International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors
• Ehrstein, James[Herausgeber]

Titel

Papers from the Third International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors : 20 - 22 March 1995, MCNC, Center for Microelectonics, Research Triangle Park, North Carolina

Ist Teil von

• Papers from the Third International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors (Alle Bände)

Erscheinungsjahr

1996

Beschreibungen/Notizen

• In: Journal of vacuum science & technology. B. - ISSN 0734-211X. - Ser. 2, Vol. 14 (1996),1, S. 191 - 462