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Low-energy electron interaction and focused electron beam-induced deposition of molybdenum hexacarbonyl (Mo(CO) 6 )

Beilstein journal of nanotechnology, 2022-02, Vol.13 (1), p.182-191

2022

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Industrial perspective on focused electron beam-induced processes

Applied physics. A, Materials science & processing, 2014-12, Vol.117 (4), p.1607-1614

2014

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SiO2 etching and surface evolution using combined exposure to CF4/O2 remote plasma and electron beam

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2022-12, Vol.40 (6)

2022

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Etching of Si3N4 induced by electron beam plasma from hollow cathode plasma in a downstream reactive environment

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2020-05, Vol.38 (3)

2020

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Electron beam injection from a hollow cathode plasma into a downstream reactive environment: Characterization of secondary plasma production and Si3N4 and Si etching

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2020-05, Vol.38 (3)

2020

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Etching of Si 3 N 4 induced by electron beam plasma from hollow cathode plasma in a downstream reactive environment

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2020-05, Vol.38 (3)

2020

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Electron beam injection from a hollow cathode plasma into a downstream reactive environment: Characterization of secondary plasma production and Si 3 N 4 and Si etching

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2020-05, Vol.38 (3)

2020

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Electron beam-induced etching of SiO2, Si3N4, and poly-Si assisted by CF4/O2 remote plasma

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2023-01, Vol.41 (1)

2023

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Dissociative ionization and electron beam induced deposition of tetrakis(dimethylamino)silane, a precursor for silicon nitride deposition

Physical chemistry chemical physics : PCCP, 2022-04, Vol.24 (16), p.9564-9575

2022

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Low-energy electron interaction and focused electron beaminduced deposition of molybdenum hexacarbonyl (Mo(CO)6)

Beilstein journal of nanotechnology, 2022-01, Vol.13, p.182-191

2022

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Experimental observation of mode evolution in single-mode tapered optical fibers

Journal of lightwave technology, 1999-09, Vol.17 (9), p.1649-1656

1999

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Focused ion-beam fabrication of fiber probes with well-defined apertures for use in near-field scanning optical microscopy

Applied physics letters, 1998-06, Vol.72 (24), p.3133-3135

1998

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Modeling of focused ion beam induced chemistry and comparison with experimental data

Microelectronic engineering, 2001-09, Vol.57, p.263-268

2001

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Investigation of cell adhesion to structured surfaces using total internal reflection fluorescence and confocal laser scanning microscopy

European journal of cell biology, 2006-04, Vol.85 (3), p.225-228

2006

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Application of a Scanning Thermal Nano-Probe for Thermal Imaging of High Frequency Active devices

Japanese Journal of Applied Physics, 2005-09, Vol.44 (9R), p.6823

2005

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Chapter 12 - Focused Ion Beams for Direct Writing

Direct-Write Technologies for Rapid Prototyping, 2002, p.347-383

Edinger, Klaus

2002

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Structuring of Conducting Polymers by Ion Implantation

MRS proceedings, 1995, Vol.396, Article 317

1995

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Electron-beam-based photomask repair

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2004-11, Vol.22 (6), p.2902-2906

2004

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Modeling of focused ion beam induced surface chemistry

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000-11, Vol.18 (6), p.3190-3193

2000

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Investigation of a microtriode with a planar field emitter-extractor source fabricated by direct-write nanolithography using electron beam induced deposition

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2005-03, Vol.23 (2), p.781-785

2005

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Investigartion of a planar microtriode fabricated with direct write nanolitghography using electron beam induced deposition

2004

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Testing new chemistries for mask repair with focused ion beam gas assisted etching

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2003-11, Vol.21 (6), p.3067-3071

2003

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A concept for simultaneous wasteland reclamation, fuel production, and socio-economic development in degraded areas in India: Need, potential and perspectives of Jatropha plantations

Natural resources forum, 2005-02, Vol.29 (1), p.12-24

2005

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Downregulation of the vitamin D receptor expression during acute gastrointestinal graft versus host disease is associated with poor outcome after allogeneic stem cell transplantation

Frontiers in immunology, 2022-10, Vol.13, p.1028850-1028850

2022

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Chronic Active Epstein-Barr Virus (EBV) Infection Controlled by Allogeneic Stem Cell Transplantation and EBV-Specific T Cells

Clinical infectious diseases, 2023-06, Vol.76 (12), p.2200-2202

2023

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Low-energy electron interaction and focused electron beam-induced deposition of molybdenum hexacarbonyl (Mo(CO) 6 )

Industrial perspective on focused electron beam-induced processes

SiO2 etching and surface evolution using combined exposure to CF4/O2 remote plasma and electron beam

Etching of Si3N4 induced by electron beam plasma from hollow cathode plasma in a downstream reactive environment

Electron beam injection from a hollow cathode plasma into a downstream reactive environment: Characterization of secondary plasma production and Si3N4 and Si etching

Etching of Si 3 N 4 induced by electron beam plasma from hollow cathode plasma in a downstream reactive environment

Electron beam injection from a hollow cathode plasma into a downstream reactive environment: Characterization of secondary plasma production and Si 3 N 4 and Si etching

Electron beam-induced etching of SiO2, Si3N4, and poly-Si assisted by CF4/O2 remote plasma

Dissociative ionization and electron beam induced deposition of tetrakis(dimethylamino)silane, a precursor for silicon nitride deposition

Low-energy electron interaction and focused electron beaminduced deposition of molybdenum hexacarbonyl (Mo(CO)6)

Experimental observation of mode evolution in single-mode tapered optical fibers

Focused ion-beam fabrication of fiber probes with well-defined apertures for use in near-field scanning optical microscopy

Modeling of focused ion beam induced chemistry and comparison with experimental data

Investigation of cell adhesion to structured surfaces using total internal reflection fluorescence and confocal laser scanning microscopy

Application of a Scanning Thermal Nano-Probe for Thermal Imaging of High Frequency Active devices

Chapter 12 - Focused Ion Beams for Direct Writing

Structuring of Conducting Polymers by Ion Implantation

Electron-beam-based photomask repair

Modeling of focused ion beam induced surface chemistry

Investigation of a microtriode with a planar field emitter-extractor source fabricated by direct-write nanolithography using electron beam induced deposition

Investigartion of a planar microtriode fabricated with direct write nanolitghography using electron beam induced deposition

Testing new chemistries for mask repair with focused ion beam gas assisted etching

A concept for simultaneous wasteland reclamation, fuel production, and socio-economic development in degraded areas in India: Need, potential and perspectives of Jatropha plantations

Downregulation of the vitamin D receptor expression during acute gastrointestinal graft versus host disease is associated with poor outcome after allogeneic stem cell transplantation

Chronic Active Epstein-Barr Virus (EBV) Infection Controlled by Allogeneic Stem Cell Transplantation and EBV-Specific T Cells

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