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MEMS Laser Scanners: A Review

Journal of microelectromechanical systems, 2014-04, Vol.23 (2), p.259-275

2014

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Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased Output Power

Journal of microelectromechanical systems, 2011-10, Vol.20 (5), p.1131-1142

2011

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A Seismic-Grade Resonant MEMS Accelerometer

Journal of microelectromechanical systems, 2014-08, Vol.23 (4), p.768-770

2014

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Optical MEMS: From Micromirrors to Complex Systems

Journal of microelectromechanical systems, 2014-06, Vol.23 (3), p.517-538

2014

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An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications

Journal of microelectromechanical systems, 2012-04, Vol.21 (2), p.270-283

2012

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MEMS technology for timing and frequency control

IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2007-02, Vol.54 (2), p.251-270

Nguyen, C.T.-C.

2007

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An Automatically Mode-Matched MEMS Gyroscope With Wide and Tunable Bandwidth

Journal of microelectromechanical systems, 2014-04, Vol.23 (2), p.284-297

2014

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Three-Axis Lorentz-Force Magnetic Sensor for Electronic Compass Applications

Journal of microelectromechanical systems, 2012-08, Vol.21 (4), p.1002-1010

2012

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Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

Journal of microelectromechanical systems, 2006-12, Vol.15 (6), p.1406-1418

2006

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Nanoenergetic Materials for MEMS: A Review

Journal of microelectromechanical systems, 2007-08, Vol.16 (4), p.919-931

2007

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Two-axis electromagnetic microscanner for high resolution displays

Journal of microelectromechanical systems, 2006-08, Vol.15 (4), p.786-794

2006

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Resonant PZT MEMS Scanner for High-Resolution Displays

Journal of microelectromechanical systems, 2012-12, Vol.21 (6), p.1303-1310

2012

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Achieving Sub-Hz Frequency Symmetry in Micro-Glassblown Wineglass Resonators

Journal of microelectromechanical systems, 2014-02, Vol.23 (1), p.30-38

2014

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Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked Loop

Journal of microelectromechanical systems, 2010-02, Vol.19 (1), p.192-201

2010

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Temperature Dependence of Quality Factor in MEMS Resonators

Journal of microelectromechanical systems, 2008-06, Vol.17 (3), p.755-766

2008

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Nonlinear Dynamics of MEMS Arches Under Harmonic Electrostatic Actuation

Journal of microelectromechanical systems, 2010-06, Vol.19 (3), p.647-656

2010

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Design and Characterization of Artificial Haircell Sensor for Flow Sensing With Ultrahigh Velocity and Angular Sensitivity

Journal of microelectromechanical systems, 2007-10, Vol.16 (5), p.999-1014

2007

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Quadrature-Error Compensation and Corresponding Effects on the Performance of Fully Decoupled MEMS Gyroscopes

Journal of microelectromechanical systems, 2012-06, Vol.21 (3), p.656-667

2012

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Engineering MEMS Resonators With Low Thermoelastic Damping

Journal of microelectromechanical systems, 2006-12, Vol.15 (6), p.1437-1445

2006

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A reduced-order model for electrically actuated microbeam-based MEMS

Journal of microelectromechanical systems, 2003-10, Vol.12 (5), p.672-680

2003

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A Feedback Controlled MEMS Nanopositioner for On-Chip High-Speed AFM

Journal of microelectromechanical systems, 2014-06, Vol.23 (3), p.610-619

2014

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Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic Field

Journal of microelectromechanical systems, 2007-02, Vol.16 (1), p.7-15

2007

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An Experimental and Theoretical Investigation of Dynamic Pull-In in MEMS Resonators Actuated Electrostatically

Journal of microelectromechanical systems, 2010-08, Vol.19 (4), p.794-806

2010

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An untethered, electrostatic, globally controllable MEMS micro-robot

Journal of microelectromechanical systems, 2006-02, Vol.15 (1), p.1-15

2006

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Investigation on Mechanically Bistable MEMS Devices for Energy Harvesting From Vibrations

Journal of microelectromechanical systems, 2012-08, Vol.21 (4), p.779-790

2012

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MEMS Laser Scanners: A Review

Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased Output Power

A Seismic-Grade Resonant MEMS Accelerometer

Optical MEMS: From Micromirrors to Complex Systems

An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications

MEMS technology for timing and frequency control

An Automatically Mode-Matched MEMS Gyroscope With Wide and Tunable Bandwidth

Three-Axis Lorentz-Force Magnetic Sensor for Electronic Compass Applications

Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

Nanoenergetic Materials for MEMS: A Review

Two-axis electromagnetic microscanner for high resolution displays

Resonant PZT MEMS Scanner for High-Resolution Displays

Achieving Sub-Hz Frequency Symmetry in Micro-Glassblown Wineglass Resonators

Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked Loop

Temperature Dependence of Quality Factor in MEMS Resonators

Nonlinear Dynamics of MEMS Arches Under Harmonic Electrostatic Actuation

Design and Characterization of Artificial Haircell Sensor for Flow Sensing With Ultrahigh Velocity and Angular Sensitivity

Quadrature-Error Compensation and Corresponding Effects on the Performance of Fully Decoupled MEMS Gyroscopes

Engineering MEMS Resonators With Low Thermoelastic Damping

A reduced-order model for electrically actuated microbeam-based MEMS

A Feedback Controlled MEMS Nanopositioner for On-Chip High-Speed AFM

Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic Field

An Experimental and Theoretical Investigation of Dynamic Pull-In in MEMS Resonators Actuated Electrostatically

An untethered, electrostatic, globally controllable MEMS micro-robot

Investigation on Mechanically Bistable MEMS Devices for Energy Harvesting From Vibrations

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