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Diffusion mechanisms and corrosion resistance of nanostructured ZrN-Cu coating obtained by hybrid HiPIMS-DCMS

Applied surface science, 2025-02, Vol.682, p.161635, Article 161635

2025

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Unleashing the antibiofouling potential of nano-structured ZrN-Cu coating through electricity

Surface & coatings technology, 2024-10, Vol.494, p.131503, Article 131503

2024

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High-power impulse magnetron sputter deposition of TiB x thin films: Effects of pulse length and peak current density

Vacuum, 2024, Vol.222

2024

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Effect of Si contents on microstructure and mechanical characteristics of TiAlSiN thin film deposited by HiPIMS using different TiSi target compositions

Surface & coatings technology, 2024-01, Vol.476, Article 130212

2024

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Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS

Surface & coatings technology, 2023-09, Vol.468, p.129719, Article 129719

2023

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Pulse length selection for optimizing the accelerated ion flux fraction of a bipolar HiPIMS discharge

Plasma sources science & technology, 2020-12, Vol.29 (12), p.125013

2020

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Ion energy distributions at substrate in bipolar HiPIMS: effect of positive pulse delay, length and amplitude

Plasma sources science & technology, 2020-06, Vol.29 (6), p.65003

2020

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Diagnosing asymmetric bipolar HiPIMS discharges using laser Thomson scattering

Plasma sources science & technology, 2021-10, Vol.30 (10), p.105019

2021

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Evidence for fireballs in bipolar HiPIMS plasmas

Plasma sources science & technology, 2023-02, Vol.32 (2), p.25015

2023

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Deposition of Fe2O3:Sn semiconducting thin films by reactive pulsed HiPIMS + ECWR co-sputtering from Fe and Sn targets

Journal of photochemistry and photobiology. A, Chemistry., 2024-09, Vol.454, p.115676, Article 115676

2024

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Enhancement of hole mobility in high-rate reactively sputtered Cu2O thin films induced by laser thermal annealing

Applied surface science, 2024-08, Vol.664, p.160255, Article 160255

2024

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Copper thin films deposited using different ion acceleration strategies in HiPIMS

Surface & coatings technology, 2021-09, Vol.422, p.127487, Article 127487

2021

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Early-stage silver growth during sputter deposition on SiO2 and polystyrene – Comparison of biased DC magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS) and bipolar HiPIMS

Applied surface science, 2024-09, Vol.666, p.160392, Article 160392

2024

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Extremely enhanced friction and wear performance of hydrogen-free DLC film at elevated temperatures via Si doping

Tribology international, 2024-11, Vol.199, p.109981, Article 109981

2024

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HiPIMS and bipolar HiPIMS techniques for tunable phase formation of yttrium oxide thin films at low-temperature

Vacuum, 2024-08, Vol.226, p.113336, Article 113336

2024

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High-performance coatings for cutting tools

CIRP journal of manufacturing science and technology, 2017-08, Vol.18, p.1-9

Bobzin, Kirsten

2017

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Ti atom and Ti ion number density evolution in standard and multi-pulse HiPIMS

Journal of physics. D, Applied physics, 2017-09, Vol.50 (36), p.365202

2017

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HiPIMS pulse shape influence on the deposition of diamond-like carbon films

Surface & coatings technology, 2022-02, Vol.432, p.128059, Article 128059

2022

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Temporal, spatial and spectroscopic study of plasma emission on Cu target in bipolar HiPIMS

Plasma sources science & technology, 2023-07, Vol.32 (7), p.75019

2023

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Ultrafast deposition of ultrahard Cr films in tubes by bipolar-HiPIMS with small target-substrate distance

Vacuum, 2025-01, Vol.231, p.113759, Article 113759

2025

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Hybrid HiPIMS + controlled pulsed arc for deposition of hard coatings

Surface & coatings technology, 2022-09, Vol.446, p.128765, Article 128765

2022

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Optimizing the ion diffusion in bipolar-pulse HiPIMS discharge (BP-HiPIMS) via an auxiliary anode

Plasma sources science & technology, 2021-09, Vol.30 (9), p.95016

2021

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Bipolar mixed-mode high-power impulse magnetron sputtering of carbon

Vacuum, 2023-09, Vol.215, p.112395, Article 112395

2023

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Plasma flux and energy enhancement in BP-HiPIMS discharge via auxiliary anode and solenoidal coil

Plasma sources science & technology, 2021-11, Vol.30 (11), p.115002

2021

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Time-resolved electron energy distribution functions at the substrate during a HiPIMS discharge with cathode voltage reversal

Plasma sources science & technology, 2022-06, Vol.31 (6), p.65001

2022

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Diffusion mechanisms and corrosion resistance of nanostructured ZrN-Cu coating obtained by hybrid HiPIMS-DCMS

Unleashing the antibiofouling potential of nano-structured ZrN-Cu coating through electricity

High-power impulse magnetron sputter deposition of TiB x thin films: Effects of pulse length and peak current density

Effect of Si contents on microstructure and mechanical characteristics of TiAlSiN thin film deposited by HiPIMS using different TiSi target compositions

Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS

Pulse length selection for optimizing the accelerated ion flux fraction of a bipolar HiPIMS discharge

Ion energy distributions at substrate in bipolar HiPIMS: effect of positive pulse delay, length and amplitude

Diagnosing asymmetric bipolar HiPIMS discharges using laser Thomson scattering

Evidence for fireballs in bipolar HiPIMS plasmas

Deposition of Fe2O3:Sn semiconducting thin films by reactive pulsed HiPIMS + ECWR co-sputtering from Fe and Sn targets

Enhancement of hole mobility in high-rate reactively sputtered Cu2O thin films induced by laser thermal annealing

Copper thin films deposited using different ion acceleration strategies in HiPIMS

Early-stage silver growth during sputter deposition on SiO2 and polystyrene – Comparison of biased DC magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS) and bipolar HiPIMS

Extremely enhanced friction and wear performance of hydrogen-free DLC film at elevated temperatures via Si doping

HiPIMS and bipolar HiPIMS techniques for tunable phase formation of yttrium oxide thin films at low-temperature

High-performance coatings for cutting tools

Ti atom and Ti ion number density evolution in standard and multi-pulse HiPIMS

HiPIMS pulse shape influence on the deposition of diamond-like carbon films

Temporal, spatial and spectroscopic study of plasma emission on Cu target in bipolar HiPIMS

Ultrafast deposition of ultrahard Cr films in tubes by bipolar-HiPIMS with small target-substrate distance

Hybrid HiPIMS + controlled pulsed arc for deposition of hard coatings

Optimizing the ion diffusion in bipolar-pulse HiPIMS discharge (BP-HiPIMS) via an auxiliary anode

Bipolar mixed-mode high-power impulse magnetron sputtering of carbon

Plasma flux and energy enhancement in BP-HiPIMS discharge via auxiliary anode and solenoidal coil

Time-resolved electron energy distribution functions at the substrate during a HiPIMS discharge with cathode voltage reversal

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