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Bidirectional CMOS-MEMS Airflow Sensor With Sub-mW Power Consumption and High Sensitivity

IEEE transactions on industrial electronics (1982), 2022-03, Vol.69 (3), p.3183-3192

2022

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A Miniaturized CMOS-MEMS Amperometric Gas Sensor for Rapid Ethanol Detection

IEEE sensors journal, 2023-04, Vol.23 (8), p.1-1

2023

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Design and Implementation of Vertically Integrated Deformable Hermetic Chambers for the Sensitivity Enhancement of CMOS-MEMS Capacitive Pressure Sensor

IEEE sensors journal, 2022-12, Vol.22 (24), p.1-1

2022

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Mitigating the Insufficient Etching Selectivity in the Wet Release Process of CMOS-MEMS Metal Resonators Via Diffusion Control

Journal of microelectromechanical systems, 2020-12, Vol.29 (6), p.1415-1417

2020

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Geometrically engineered mass sensing CMOS-MEMS resonators for temperature compensation via folded anchors

Sensors and actuators. A. Physical., 2024-08, Vol.373, p.115435, Article 115435

2024

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Determination of Thermal Conductivities for Thin-Film Materials in CMOS MEMS Process

IEEE transactions on instrumentation and measurement, 2021, Vol.70, p.1-9

2021

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CMOS-MEMS technologies for the applications of environment sensors and environment sensing hubs

Journal of micromechanics and microengineering, 2021-07, Vol.31 (7), p.74004

2021

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MEMS-based thermoelectric infrared sensors: A review

Frontiers of Mechanical Engineering, 2017-12, Vol.12 (4), p.557-566

2017

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A Self-Powered CMOS Reconfigurable Multi-Sensor SoC for Biomedical Applications

IEEE journal of solid-state circuits, 2014-04, Vol.49 (4), p.851-866

2014

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Resonant inertial mass sensing for VOCs: CMOS-compatible SoC integration advantages and challenges: A review

IEEE sensors journal, 2023-01, Vol.23 (1), p.1-1

2023

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Performance enhance of CMOS-MEMS thermoelectric infrared sensor by using sensing material and structure design

Journal of micromechanics and microengineering, 2019-02, Vol.29 (2), p.25007

2019

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Development of CMOS-MEMS/NEMS Devices

2019

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A 46.6 μg/√Hz Single-Chip Accelerometer Exploiting a DTC-Assisted Chopper Amplifier

IEEE journal of solid-state circuits, 2024-02, Vol.59 (2), p.502-515

2024

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Diode-Like Field Emission Devices Fabricated by Standard 0.35-μm CMOS MEMS Process

IEEE transactions on electron devices, 2024-09, Vol.71 (9), p.5696-5700

2024

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Out-of-plane MEMS-based mechanical airflow sensor co-integrated in SOI CMOS technology

Sensors and actuators. A. Physical., 2014-02, Vol.206, p.67-74

2014

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CMOS MEMS Thermoelectric Infrared Sensor With Plasmonic Metamaterial Absorber for Selective Wavelength Absorption and Responsivity Enhancement

IEEE sensors journal, 2020-10, Vol.20 (19), p.11105-11114

2020

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A multichannel thermal bubble-actuated impedance flow cytometer with on-chip TIA based on CMOS-MEMS

Journal of semiconductors, 2024-05, Vol.45 (5), p.52201

2024

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Curvature of BEOL Cantilevers in CMOS-MEMS Processes

Journal of microelectromechanical systems, 2017-08, Vol.26 (4), p.895-909

2017

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Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor

Journal of microelectromechanical systems, 2024-04, Vol.33 (2), p.274-281

2024

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A Wafer-Level Packaged CMOS MEMS Pirani Vacuum Gauge

IEEE transactions on electron devices, 2021-10, Vol.68 (10), p.5155-5161

2021

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A 0.35-μm CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection

Micromachines (Basel), 2018-09, Vol.9 (10), p.484

2018

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A Portable Micro Gas Chromatography System for Lung Cancer Associated Volatile Organic Compound Detection

IEEE journal of solid-state circuits, 2016-01, Vol.51 (1), p.259-272

2016

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Modeling and Feasibility Study of a Micro-Machined Microphone Based on the Piezoresistive Effect of a Field-Effect Transistor

IEEE sensors journal, 2024-06, Vol.24 (12), p.18903-18915

2024

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A CMOS-MEMS Thermoresistive Micro Calorimetric Flow Sensor With Temperature Compensation

Journal of microelectromechanical systems, 2019-10, Vol.28 (5), p.841-849

2019

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CMOS MEMS Fabrication Technologies and Devices

Micromachines (Basel), 2016-01, Vol.7 (1), p.14

Qu, Hongwei

2016

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Bidirectional CMOS-MEMS Airflow Sensor With Sub-mW Power Consumption and High Sensitivity

A Miniaturized CMOS-MEMS Amperometric Gas Sensor for Rapid Ethanol Detection

Design and Implementation of Vertically Integrated Deformable Hermetic Chambers for the Sensitivity Enhancement of CMOS-MEMS Capacitive Pressure Sensor

Mitigating the Insufficient Etching Selectivity in the Wet Release Process of CMOS-MEMS Metal Resonators Via Diffusion Control

Geometrically engineered mass sensing CMOS-MEMS resonators for temperature compensation via folded anchors

Determination of Thermal Conductivities for Thin-Film Materials in CMOS MEMS Process

CMOS-MEMS technologies for the applications of environment sensors and environment sensing hubs

MEMS-based thermoelectric infrared sensors: A review

A Self-Powered CMOS Reconfigurable Multi-Sensor SoC for Biomedical Applications

Resonant inertial mass sensing for VOCs: CMOS-compatible SoC integration advantages and challenges: A review

Performance enhance of CMOS-MEMS thermoelectric infrared sensor by using sensing material and structure design

Development of CMOS-MEMS/NEMS Devices

A 46.6 μg/√Hz Single-Chip Accelerometer Exploiting a DTC-Assisted Chopper Amplifier

Diode-Like Field Emission Devices Fabricated by Standard 0.35-μm CMOS MEMS Process

Out-of-plane MEMS-based mechanical airflow sensor co-integrated in SOI CMOS technology

CMOS MEMS Thermoelectric Infrared Sensor With Plasmonic Metamaterial Absorber for Selective Wavelength Absorption and Responsivity Enhancement

A multichannel thermal bubble-actuated impedance flow cytometer with on-chip TIA based on CMOS-MEMS

Curvature of BEOL Cantilevers in CMOS-MEMS Processes

Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor

A Wafer-Level Packaged CMOS MEMS Pirani Vacuum Gauge

A 0.35-μm CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection

A Portable Micro Gas Chromatography System for Lung Cancer Associated Volatile Organic Compound Detection

Modeling and Feasibility Study of a Micro-Machined Microphone Based on the Piezoresistive Effect of a Field-Effect Transistor

A CMOS-MEMS Thermoresistive Micro Calorimetric Flow Sensor With Temperature Compensation

CMOS MEMS Fabrication Technologies and Devices

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