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Fabrication and testing of bulk micromachined silicon carbide piezoresistive pressure sensors for high temperature applications

IEEE sensors journal, 2006-04, Vol.6 (2), p.316-324

2006

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Contactless radio frequency probes for high-temperature characterisation of microwave integrated circuits

Electronics letters, 2014-05, Vol.50 (11), p.817-819

2014

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Fabrication and characterization of polycrystalline SiC resonators

IEEE transactions on electron devices, 2002-12, Vol.49 (12), p.2323-2332

2002

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Mechanical properties of epitaxial 3C silicon carbide thin films

Journal of microelectromechanical systems, 2005-08, Vol.14 (4), p.664-672

2005

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Fabrication and testing of surface micromachined polycrystalline SiC micromotors

IEEE electron device letters, 2000-04, Vol.21 (4), p.164-166

2000

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Fabrication and testing of micromachined silicon carbide and nickel fuel atomizers for gas turbine engines

Journal of microelectromechanical systems, 1999-09, Vol.8 (3), p.251-257

1999

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Polycrystalline silicon-carbide surface-micromachined vertical resonators-part II: electrical testing and material property extraction

Journal of microelectromechanical systems, 2005-06, Vol.14 (3), p.579-589

2005

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An oversampled capacitance-to-voltage converter IC with application to time-domain characterization of MEMS resonators

IEEE sensors journal, 2005-12, Vol.5 (6), p.1353-1361

2005

Volltextzugriff (PDF)

Polycrystalline silicon-carbide surface-micromachined vertical resonators-part I: growth study and device fabrication

Journal of microelectromechanical systems, 2005-06, Vol.14 (3), p.567-578

2005

Volltextzugriff (PDF)

Silicon carbide MEMS for harsh environments

Proceedings of the IEEE, 1998-08, Vol.86 (8), p.1594-1609

1998

Volltextzugriff (PDF)

Mechanical characterization of chemical-vapor-deposited polycrystalline 3C silicon carbide thin films

Scripta materialia, 2008-11, Vol.59 (9), p.995-998

2008

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SiC cantilever resonators with electrothermal actuation

Sensors and actuators. A. Physical., 2006-04, Vol.128 (2), p.376-386

2006

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Surface micromachining of polycrystalline SiC films using microfabricated molds of SiO/sub 2/ and polysilicon

Journal of microelectromechanical systems, 1999-09, Vol.8 (3), p.237-242

1999

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Silicon carbide for microelectromechanical systems

International materials reviews, 2000-03, Vol.45 (3), p.85-108

2000

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Development of Nickel Wire Bonding for High-Temperature Packaging of SiC Devices

IEEE transactions on advanced packaging, 2009-05, Vol.32 (2), p.564-574, Article 564

2009

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Pendeo-epitaxial growth of thin films of gallium nitride and related materials and their characterization

Journal of crystal growth, 2001-05, Vol.225 (2-4), p.134-140

2001

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Dry release fabrication and testing of SiC electrostatic cantilever actuators

Microelectronic engineering, 2005-03, Vol.78, p.106-111

2005

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Fabrication of hall device structures in 3C-SiC using microelectromechanical processing technology

Microelectronic engineering, 2006-04, Vol.83 (4), p.1396-1399

2006

Volltextzugriff (PDF)

Review of Pendeo-Epitaxial Growth and Characterization of Thin Films of GaN and AlGaN Alloys on 6H-SiC(0001) and Si(111) Substrates

MRS Internet journal of nitride semiconductor research, 2001, Vol.6, p.14-14, Article e14

2001

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Electrostatically Driven Touch-Mode Poly-SiC Microspeaker

2007 IEEE Sensors, 2007, p.284-287

2007

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Silicon carbide as a material for biomedical microsystems

2009 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS, 2009, p.1-7

Zorman, C.A.

2009

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Stacking rearrangement at 6H–SiC(0 0 0 1) surfaces during thermal hydrogenation

Surface science, 2003-06, Vol.532, p.698-704

2003

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Multi-layered poly-dimethylsiloxane as a non-hermetic packaging material for medical MEMS

2012 Annual International Conference of the IEEE Engineering in Medicine and Biology Society, 2012-01, Vol.2012, p.1655-1658

2012

Volltextzugriff (PDF)

Effect of MEMS-compatible thin film hard coatings on the erosion resistance of silicon micromachined atomizers

Surface & coatings technology, 1998-10, Vol.108, p.391-397

1998

Volltextzugriff (PDF)

Poly-SiC capacitive pressure sensors made by wafer bonding

IEEE Sensors, 2005, 2005, p.4 pp.

2005

Volltextzugriff (PDF)

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Fabrication and testing of bulk micromachined silicon carbide piezoresistive pressure sensors for high temperature applications

Contactless radio frequency probes for high-temperature characterisation of microwave integrated circuits

Fabrication and characterization of polycrystalline SiC resonators

Mechanical properties of epitaxial 3C silicon carbide thin films

Fabrication and testing of surface micromachined polycrystalline SiC micromotors

Fabrication and testing of micromachined silicon carbide and nickel fuel atomizers for gas turbine engines

Polycrystalline silicon-carbide surface-micromachined vertical resonators-part II: electrical testing and material property extraction

An oversampled capacitance-to-voltage converter IC with application to time-domain characterization of MEMS resonators

Polycrystalline silicon-carbide surface-micromachined vertical resonators-part I: growth study and device fabrication

Silicon carbide MEMS for harsh environments

Mechanical characterization of chemical-vapor-deposited polycrystalline 3C silicon carbide thin films

SiC cantilever resonators with electrothermal actuation

Surface micromachining of polycrystalline SiC films using microfabricated molds of SiO/sub 2/ and polysilicon

Silicon carbide for microelectromechanical systems

Development of Nickel Wire Bonding for High-Temperature Packaging of SiC Devices

Pendeo-epitaxial growth of thin films of gallium nitride and related materials and their characterization

Dry release fabrication and testing of SiC electrostatic cantilever actuators

Fabrication of hall device structures in 3C-SiC using microelectromechanical processing technology

Review of Pendeo-Epitaxial Growth and Characterization of Thin Films of GaN and AlGaN Alloys on 6H-SiC(0001) and Si(111) Substrates

Electrostatically Driven Touch-Mode Poly-SiC Microspeaker

Silicon carbide as a material for biomedical microsystems

Stacking rearrangement at 6H–SiC(0 0 0 1) surfaces during thermal hydrogenation

Multi-layered poly-dimethylsiloxane as a non-hermetic packaging material for medical MEMS

Effect of MEMS-compatible thin film hard coatings on the erosion resistance of silicon micromachined atomizers

Poly-SiC capacitive pressure sensors made by wafer bonding

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