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Optimization of Reactive Ion Etching of Polycrystalline Diamond for MEMS Applications

Journal of microelectromechanical systems, 2015-12, Vol.24 (6), p.1681-1683

2015

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Fabrication technology for single-material MEMS using polycrystalline diamond

Diamond and related materials, 2010-10, Vol.19 (10), p.1263-1272

2010

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Synthesis of carbon nanostructures on nanocrystalline Ni–Ni3P catalyst supported by SiC whiskers

Carbon (New York), 2003, Vol.41 (3), p.579-582

2003

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An H2 emission model for piezoelectric devices exhibiting strong lateral mode resonances

2017 IEEE International Ultrasonics Symposium (IUS), 2017, p.1-1

2017

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An H2 emissions model for piezoelectric devices exhibiting strong lateral mode resonances

2017 IEEE International Ultrasonics Symposium (IUS), 2017, p.1-7

2017

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An alternative method for determining the 2nd order nonlinear constants of a piezoelectric film

2017 IEEE International Ultrasonics Symposium (IUS), 2017, p.1-6

2017

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An alternative method for determining the 2nd order nonlinear coefficients of BAW resonators

2017 IEEE International Ultrasonics Symposium (IUS), 2017, p.1-1

2017

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Piezoelectrically transduced high-Q silica micro resonators

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), 2013, p.122-125

2013

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MEMS structures using polycrystalline diamond single-material micro technologies

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, 2010, p.557-560

2010

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All-diamond integrated field emission device with a micro-tip array cathode

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, 2010, p.565-568

2010

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Drie of fused silica

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), 2013, p.361-364

2013

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Fabrication and testing of CVD diamond single-material MEMS resonators with piezoresistive detection

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, 2011, p.2359-2361

2011

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Single-material MEMS using polycrystalline diamond

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), 2010, p.51-54

2010

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Thin film packaging process for MEMS device using polycrystalline diamond

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, 2010, p.802-805

2010

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Single-material MEMS using polycyrstalline diamond

Cao, Zongliang

2011

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A Procedure to Correct for Anomalies in Estimating the Time Averaged Stored Energy of a BAW Resonator from its S11 Parameters

2022 IEEE International Ultrasonics Symposium (IUS), 2022, p.1-5

2022

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Piezoresistive sensor technology for RFMEMS using p-type polycrystalline diamond

2009 IEEE Nanotechnology Materials and Devices Conference, 2009, p.190-195

2009

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An Improved Formula for Estimating Stored Energy in a BAW Resonator by its Measured S11 Parameters

2021 IEEE International Ultrasonics Symposium (IUS), 2021, p.1-5

2021

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Analyzing the 2nd Harmonic Emissions of a BAW Resonator Undergoing Lateral Mode Excitation

2022 IEEE International Ultrasonics Symposium (IUS), 2022, p.1-5

2022

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All-diamond micro-electrode arrays for neural recordings and diamond electrochemistry

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, 2010, p.1116-1119

2010

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Synthesis of carbon nanostructures on nanocrystalline Ni–Ni 3P catalyst supported by SiC whiskers

Carbon (New York), 2003, Vol.41 (3), p.579-582

2003

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Diamond micro and nano resonators using laser, capacitive or piezoresistive detection

2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2008, p.873-876

2008

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Prediction of the H2 Response of an FBAR Resonator Using Finite Element Method

2018 IEEE International Ultrasonics Symposium (IUS), 2018, p.1-5

2018

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A write buffer design based on stable and area-saving embedded SRAM for flash applications

Science China. Technological sciences, 2015-02, Vol.58 (2), p.357-361

2015

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A 65-nm 1-Gb NOR floating-gate flash memory with less than 50-ns access time

Chinese science bulletin, 2014-10, Vol.59 (29-30), p.3935-3942

2014

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Optimization of Reactive Ion Etching of Polycrystalline Diamond for MEMS Applications

Fabrication technology for single-material MEMS using polycrystalline diamond

Synthesis of carbon nanostructures on nanocrystalline Ni–Ni3P catalyst supported by SiC whiskers

An H2 emission model for piezoelectric devices exhibiting strong lateral mode resonances

An H2 emissions model for piezoelectric devices exhibiting strong lateral mode resonances

An alternative method for determining the 2nd order nonlinear constants of a piezoelectric film

An alternative method for determining the 2nd order nonlinear coefficients of BAW resonators

Piezoelectrically transduced high-Q silica micro resonators

MEMS structures using polycrystalline diamond single-material micro technologies

All-diamond integrated field emission device with a micro-tip array cathode

Drie of fused silica

Fabrication and testing of CVD diamond single-material MEMS resonators with piezoresistive detection

Single-material MEMS using polycrystalline diamond

Thin film packaging process for MEMS device using polycrystalline diamond

Single-material MEMS using polycyrstalline diamond

A Procedure to Correct for Anomalies in Estimating the Time Averaged Stored Energy of a BAW Resonator from its S11 Parameters

Piezoresistive sensor technology for RFMEMS using p-type polycrystalline diamond

An Improved Formula for Estimating Stored Energy in a BAW Resonator by its Measured S11 Parameters

Analyzing the 2nd Harmonic Emissions of a BAW Resonator Undergoing Lateral Mode Excitation

All-diamond micro-electrode arrays for neural recordings and diamond electrochemistry

Synthesis of carbon nanostructures on nanocrystalline Ni–Ni 3P catalyst supported by SiC whiskers

Diamond micro and nano resonators using laser, capacitive or piezoresistive detection

Prediction of the H2 Response of an FBAR Resonator Using Finite Element Method

A write buffer design based on stable and area-saving embedded SRAM for flash applications

A 65-nm 1-Gb NOR floating-gate flash memory with less than 50-ns access time

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