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A Generalized Polynomial Chaos-Based Approach to Analyze the Impacts of Process Deviations on MEMS Beams

Sensors (Basel, Switzerland), 2017-11, Vol.17 (11), p.2561

2017

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An efficient electro‐thermo‐mechanical model for the analysis of V‐shaped thermal actuator connected with driven structures

International journal of numerical modelling, 2021-05, Vol.34 (3), p.n/a

2021

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Comprehensive Simulations for Ultraviolet Lithography Process of Thick SU-8 Photoresist

Micromachines (Basel), 2018-07, Vol.9 (7), p.341

2018

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A 2D Waveguide Method for Lithography Simulation of Thick SU-8 Photoresist

Micromachines (Basel), 2020-10, Vol.11 (11), p.972

2020

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Application of the evolutionary kinetic Monte Carlo method for the simulation of anisotropic wet etching of sapphire

Journal of micromechanics and microengineering, 2021-06, Vol.31 (6), p.65001

2021

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Uncertainty quantification with high-dimensional correlated process variations for an in-situ thermal expansion coefficient test structure

Sensors and actuators. A. Physical., 2024-06, Vol.371, p.115281, Article 115281

2024

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A Novel Measurement Method of Mechanical Properties for Individual Layers in Multilayered Thin Films

Micromachines (Basel), 2019-10, Vol.10 (10), p.669

2019

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Analysis and Compensation of Benchmark Drift of Micromachined Thermal Wind Sensor Caused by Packaging Asymmetry

IEEE transactions on industrial electronics (1982), 2022-01, Vol.69 (1), p.950-959

2022

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System-Level Optimization of MEMS Thermal Wind Sensor Based on the Co-Simulation of Macromodel and Board-Level Interface Circuits

Journal of microelectromechanical systems, 2023-12, Vol.32 (6), p.574-582

2023

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An efficient macro model for CMOS-MEMS thermal wind speed sensor

Journal of micromechanics and microengineering, 2020-12, Vol.30 (12), p.125001

2020

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Modeling of the Effect of Process Variations on a Micromachined Doubly-Clamped Beam

Micromachines (Basel), 2017-03, Vol.8 (3), p.81

2017

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Efficient system-level simulations of thermal wind sensors considering environmental factors

Journal of micromechanics and microengineering, 2022-08, Vol.32 (8), p.85002

2022

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Linearity and Sensitivity Analysis of MEMS Thermal Wind Sensor via Analytical Model

IEEE transactions on instrumentation and measurement, 2023, Vol.72, p.1-9

2023

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Three-Dimensional Simulation of DRIE Process Based on the Narrow Band Level Set and Monte Carlo Method

Micromachines (Basel), 2018-02, Vol.9 (2), p.74

2018

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In-Situ Testing of the Thermal Diffusivity of Polysilicon Thin Films

Micromachines (Basel), 2016-10, Vol.7 (10), p.174-174

2016

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Modeling, simulation and experimental verification of inclined UV lithography for SU-8 negative thick photoresists

Journal of micromechanics and microengineering, 2008-12, Vol.18 (12), p.125017-125017 (11)

2008

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Uncertainty quantification of MEMS devices with correlated random parameters

Microsystem technologies : sensors, actuators, systems integration, 2020-05, Vol.26 (5), p.1689-1696

2020

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An atomic level model for silicon anisotropic etching processes: Cellular automaton simulation and experimental verification

Applied physics letters, 2007-10, Vol.91 (17), p.174101-174101-3

2007

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A simple method for extracting material parameters of multilayered MEMS structures using resonance frequency measurements

Journal of micromechanics and microengineering, 2014-07, Vol.24 (7), p.75014-7

2014

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Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology

Journal of sensors, 2019-01, Vol.2019, p.1-10

2019

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Three-dimensional modeling and simulation of the Bosch process with the level set method

IEEE SENSORS 2014 Proceedings, 2014, p.570-573

2014

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A Novel 3-D Dynamic Cellular Automata Model for Photoresist-Etching Process Simulation

IEEE transactions on computer-aided design of integrated circuits and systems, 2007-01, Vol.26 (1), p.100-114

2007

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A Simple Extraction Method of Young's Modulus for Multilayer Films in MEMS Applications

Micromachines (Basel), 2017-06, Vol.8 (7), p.201

2017

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In-situ determination of the coefficient of thermal expansion of polysilicon thin films using micro-rotating structures

Thin solid films, 2014-02, Vol.552, p.184-191

2014

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Large scale three-dimensional simulations for thick SU-8 lithography process based on a full hash fast marching method

Microelectronic engineering, 2014-07, Vol.123, p.171-174

2014

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A Generalized Polynomial Chaos-Based Approach to Analyze the Impacts of Process Deviations on MEMS Beams

An efficient electro‐thermo‐mechanical model for the analysis of V‐shaped thermal actuator connected with driven structures

Comprehensive Simulations for Ultraviolet Lithography Process of Thick SU-8 Photoresist

A 2D Waveguide Method for Lithography Simulation of Thick SU-8 Photoresist

Application of the evolutionary kinetic Monte Carlo method for the simulation of anisotropic wet etching of sapphire

Uncertainty quantification with high-dimensional correlated process variations for an in-situ thermal expansion coefficient test structure

A Novel Measurement Method of Mechanical Properties for Individual Layers in Multilayered Thin Films

Analysis and Compensation of Benchmark Drift of Micromachined Thermal Wind Sensor Caused by Packaging Asymmetry

System-Level Optimization of MEMS Thermal Wind Sensor Based on the Co-Simulation of Macromodel and Board-Level Interface Circuits

An efficient macro model for CMOS-MEMS thermal wind speed sensor

Modeling of the Effect of Process Variations on a Micromachined Doubly-Clamped Beam

Efficient system-level simulations of thermal wind sensors considering environmental factors

Linearity and Sensitivity Analysis of MEMS Thermal Wind Sensor via Analytical Model

Three-Dimensional Simulation of DRIE Process Based on the Narrow Band Level Set and Monte Carlo Method

In-Situ Testing of the Thermal Diffusivity of Polysilicon Thin Films

Modeling, simulation and experimental verification of inclined UV lithography for SU-8 negative thick photoresists

Uncertainty quantification of MEMS devices with correlated random parameters

An atomic level model for silicon anisotropic etching processes: Cellular automaton simulation and experimental verification

A simple method for extracting material parameters of multilayered MEMS structures using resonance frequency measurements

Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology

Three-dimensional modeling and simulation of the Bosch process with the level set method

A Novel 3-D Dynamic Cellular Automata Model for Photoresist-Etching Process Simulation

A Simple Extraction Method of Young's Modulus for Multilayer Films in MEMS Applications

In-situ determination of the coefficient of thermal expansion of polysilicon thin films using micro-rotating structures

Large scale three-dimensional simulations for thick SU-8 lithography process based on a full hash fast marching method

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