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Interference-Enhanced Absorption of Visible and Near-Infrared Radiation in Ultrathin Film Coatings

IEEE photonics technology letters, 2021-11, Vol.33 (22), p.1242-1245

2021

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Influence of surface morphology on angular photo-electron spectroscopy measurements of nanometer thin overlayers

Surface and interface analysis, 2014-10, Vol.46 (10-11), p.1047-1050

Zoethout, E.

2014

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Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source

Applied surface science, 2015-10, Vol.353, p.708-713

2015

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Taming microwave plasma to beat thermodynamics in CO2 dissociation

Faraday discussions, 2015-01, Vol.183, p.233-248

2015

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Surface-limited deuterium uptake of Ru films under plasma exposure

Journal of applied physics, 2022-12, Vol.132 (22)

2022

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Atmospheric-pressure silica-like thin film deposition using 200 kHz/13.56 MHz dual frequency excitation

Journal of physics. D, Applied physics, 2019-08, Vol.52 (35), p.355201

2019

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Extreme ultraviolet induced defects on few-layer graphene

Journal of applied physics, 2013-07, Vol.114 (4)

2013

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Surface and sub-surface thermal oxidation of thin ruthenium films

Applied physics letters, 2014-09, Vol.105 (13)

2014

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Real-space insight in the nanometer scale roughness development during growth and ion beam polishing of molybdenum silicon multilayer films

Applied surface science, 2013-11, Vol.285, p.293-299

2013

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Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography

Thin solid films, 2009-12, Vol.518 (5), p.1365-1368

2009

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Properties of broadband depth-graded multilayer mirrors for EUV optical systems

Optics express, 2010-03, Vol.18 (7), p.6957-6971

2010

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Defect formation in single layer graphene under extreme ultraviolet irradiation

Applied surface science, 2014-10, Vol.317, p.745-751

2014

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Fast nanostructured carbon microparticle synthesis by one-step high-flux plasma processing

Carbon (New York), 2017-11, Vol.124, p.403-414

2017

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Subwavelength single layer absorption resonance antireflection coatings

Optics express, 2014-01, Vol.22 (1), p.490-497

2014

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Influence of noble gas ion polishing species on extreme ultraviolet mirrors

Journal of applied physics, 2012-12, Vol.112 (12)

2012

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Thermally induced interface chemistry in Mo/B4C/Si/B4C multilayered films

Journal of applied physics, 2012-09, Vol.112 (5)

2012

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Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics

Thin solid films, 2010-10, Vol.518 (24), p.7249-7252

2010

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Interactions of C in layered Mo–Si structures

Thin solid films, 2013-09, Vol.542, p.210-213

2013

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Model independent x-ray standing wave analysis of periodic multilayer structures

Journal of applied physics, 2014-04, Vol.115 (13)

2014

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Secondary electron emission of tin and tin-lithium under low energy helium plasma exposure

Nuclear materials and energy, 2017-12, Vol.13 (C), p.21-27

2017

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Erosion yields of carbon under various plasma conditions in Pilot-PSI

Journal of nuclear materials, 2011-08, Vol.415 (1), p.S149-S152

2011

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Reduction of interlayer thickness by low-temperature deposition of Mo/Si multilayer mirrors for X-ray reflection

Applied surface science, 2011-05, Vol.257 (14), p.6251-6255

2011

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Salisbury screen with lossy nonconducting materials: Way to increase spectral selectivity of absorption

Thin solid films, 2022-06, Vol.751, p.139232, Article 139232

2022

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Reflective multilayer optics for 6.7nm wavelength radiation sources and next generation lithography

Thin solid films, 2009-12, Vol.518 (5), p.1365-1368

2009

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Thermally induced decomposition of B4C barrier layers in Mo/Si multilayer structures

Surface & coatings technology, 2010-12, Vol.205 (7), p.2469-2473

2010

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Interference-Enhanced Absorption of Visible and Near-Infrared Radiation in Ultrathin Film Coatings

Influence of surface morphology on angular photo-electron spectroscopy measurements of nanometer thin overlayers

Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source

Taming microwave plasma to beat thermodynamics in CO2 dissociation

Surface-limited deuterium uptake of Ru films under plasma exposure

Atmospheric-pressure silica-like thin film deposition using 200 kHz/13.56 MHz dual frequency excitation

Extreme ultraviolet induced defects on few-layer graphene

Surface and sub-surface thermal oxidation of thin ruthenium films

Real-space insight in the nanometer scale roughness development during growth and ion beam polishing of molybdenum silicon multilayer films

Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography

Properties of broadband depth-graded multilayer mirrors for EUV optical systems

Defect formation in single layer graphene under extreme ultraviolet irradiation

Fast nanostructured carbon microparticle synthesis by one-step high-flux plasma processing

Subwavelength single layer absorption resonance antireflection coatings

Influence of noble gas ion polishing species on extreme ultraviolet mirrors

Thermally induced interface chemistry in Mo/B4C/Si/B4C multilayered films

Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics

Interactions of C in layered Mo–Si structures

Model independent x-ray standing wave analysis of periodic multilayer structures

Secondary electron emission of tin and tin-lithium under low energy helium plasma exposure

Erosion yields of carbon under various plasma conditions in Pilot-PSI

Reduction of interlayer thickness by low-temperature deposition of Mo/Si multilayer mirrors for X-ray reflection

Salisbury screen with lossy nonconducting materials: Way to increase spectral selectivity of absorption

Reflective multilayer optics for 6.7nm wavelength radiation sources and next generation lithography

Thermally induced decomposition of B4C barrier layers in Mo/Si multilayer structures

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