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Metrology and inspection required for next generation lithography

Japanese Journal of Applied Physics, 2017-06, Vol.56 (6S1), p.6

2017

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Nonadiabatic photochemical reaction and application to photolithography

Journal of luminescence, 2007, Vol.122, p.230-233

2007

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Electrical Via Chain Yield for DSA Contact Hole Shrink Process

Journal of Photopolymer Science and Technology, 2013/06/25, Vol.26(1), pp.21-26

2013

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Sub-30nm via interconnects fabricated using directed self-assembly

Microelectronic engineering, 2013-10, Vol.110, p.152-155

2013

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Application of Directed Self-Assembly Lithography to Semiconductor Device Manufacturing Process

Electronics and communications in Japan, 2015-04, Vol.98 (4), p.59-64

2015

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The Photopolymer Science and Technology Award

Journal of Photopolymer Science and Technology, 2014/07/08, Vol.27(1), pp.7-10

2014

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Contact hole shrink process using graphoepitaxial directed self-assembly lithography

Journal of micro/nanolithography, MEMS, and MOEMS, 2013-08, Vol.12 (3), p.33011

2013

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Sub-30 nm via interconnects fabricated using directed self-assembly

Microelectronic engineering, 2013-10, Vol.110, p.152-155

2013

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Application of Directed Self-Assembly Lithography to Semiconductor Device Manufacturing Process

IEEJ Transactions on Fundamentals and Materials, 2013/10/01, Vol.133(10), pp.532-536

2013

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Sub-30 nm via interconnects fabricated using directed self-assembly : Nanolithography 2012

Microelectronic engineering, 2013, Vol.110, p.152-155

2013

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半導体プロセスへの自己組織化リソグラフィ応用

電気学会論文誌Ａ（基礎・材料・共通部門誌）, 2013/10/01, Vol.133(10), pp.532-536

2013

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Nonadiabatic photochemical reaction and application to photolithography

Journal of luminescence, 2007, Vol.122-23, p.230-233

2007

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Nanofabrication using nonadiabatic near-field photolithography

5th IEEE Conference on Nanotechnology, 2005, 2005, p.456-459 vol. 2

2005

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Is rice cultivation sink or source of nitrogen for a Japanese river?

Journal of cleaner production, 2021-02, Vol.284, p.124779, Article 124779

2021

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Phase Separation Induced by Symmetric Monocycle Optical Pulse in Extended Hubbard Models

Journal of the Physical Society of Japan, 2015-09, Vol.84 (9), p.94705

2015

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Permissive untreated pseudoaneurysm concept in damage control interventional radiology for traumatic pancreaticoduodenal artery injury

Acute medicine & surgery, 2023-01, Vol.10 (1), p.e823-n/a

2023

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Isolation of Japanese encephalitis virus and a novel insect-specific flavivirus from mosquitoes collected in a cowshed in Japan

Archives of virology, 2015-09, Vol.160 (9), p.2151-2159

2015

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Evaluation of Transcatheter Arterial Embolization with Gelatin Sponge Particles, Microcoils, and N-butyl Cyanoacrylate for Acute Arterial Bleeding in a Coagulopathic Condition

Journal of vascular and interventional radiology, 2009-09, Vol.20 (9), p.1176-1187

2009

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Comparison of Hemostatic Durability between N-Butyl Cyanoacrylate and Gelatin Sponge Particles in Transcatheter Arterial Embolization for Acute Arterial Hemorrhage in a Coagulopathic Condition in a Swine Model

Cardiovascular and interventional radiology, 2010-12, Vol.33 (6), p.1192-1197

2010

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5-Aminosalicylic Acid Given in the Remission Stage of Colitis Suppresses Colitis-Associated Cancer in a Mouse Colitis Model

Clinical cancer research, 2007-11, Vol.13 (21), p.6527-6531

2007

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Protracted course of coronavirus disease with severe acute respiratory distress syndrome: a case report

Acute medicine & surgery, 2020-01, Vol.7 (1), p.e521-n/a

2020

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Distraction Osteogenesis of Nasal Bone Including Piriform Aperture Rim for Syndromic Craniosynostosis

Plastic and reconstructive surgery (1963), 2010-10, Vol.126, p.114-115

2010

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Permissive untreated pseudoaneurysm concept in damage control interventional radiology for traumatic pancreaticoduodenal artery injury

Acute medicine & surgery, 2023, Vol.10 (1), p.e823-e823

2023

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A chiral synthesis of (−)-cannabisativine: an application of the highly diastereo-selective hetero Diels-Alder reaction

Tetrahedron letters, 1991-03, Vol.32 (13), p.1649-1652

1991

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Diels-alder reaction of chiral dienes. Remarkable effect of dienophile polarity upon diastereo face selectivity

Tetrahedron letters, 1989, Vol.30 (46), p.6405-6408

1989

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Metrology and inspection required for next generation lithography

Nonadiabatic photochemical reaction and application to photolithography

Electrical Via Chain Yield for DSA Contact Hole Shrink Process

Sub-30nm via interconnects fabricated using directed self-assembly

Application of Directed Self-Assembly Lithography to Semiconductor Device Manufacturing Process

The Photopolymer Science and Technology Award

Contact hole shrink process using graphoepitaxial directed self-assembly lithography

Sub-30 nm via interconnects fabricated using directed self-assembly

Application of Directed Self-Assembly Lithography to Semiconductor Device Manufacturing Process

Sub-30 nm via interconnects fabricated using directed self-assembly : Nanolithography 2012

半導体プロセスへの自己組織化リソグラフィ応用

Nonadiabatic photochemical reaction and application to photolithography

Nanofabrication using nonadiabatic near-field photolithography

Is rice cultivation sink or source of nitrogen for a Japanese river?

Phase Separation Induced by Symmetric Monocycle Optical Pulse in Extended Hubbard Models

Permissive untreated pseudoaneurysm concept in damage control interventional radiology for traumatic pancreaticoduodenal artery injury

Isolation of Japanese encephalitis virus and a novel insect-specific flavivirus from mosquitoes collected in a cowshed in Japan

Evaluation of Transcatheter Arterial Embolization with Gelatin Sponge Particles, Microcoils, and N-butyl Cyanoacrylate for Acute Arterial Bleeding in a Coagulopathic Condition

Comparison of Hemostatic Durability between N-Butyl Cyanoacrylate and Gelatin Sponge Particles in Transcatheter Arterial Embolization for Acute Arterial Hemorrhage in a Coagulopathic Condition in a Swine Model

5-Aminosalicylic Acid Given in the Remission Stage of Colitis Suppresses Colitis-Associated Cancer in a Mouse Colitis Model

Protracted course of coronavirus disease with severe acute respiratory distress syndrome: a case report

Distraction Osteogenesis of Nasal Bone Including Piriform Aperture Rim for Syndromic Craniosynostosis

Permissive untreated pseudoaneurysm concept in damage control interventional radiology for traumatic pancreaticoduodenal artery injury

A chiral synthesis of (−)-cannabisativine: an application of the highly diastereo-selective hetero Diels-Alder reaction

Diels-alder reaction of chiral dienes. Remarkable effect of dienophile polarity upon diastereo face selectivity

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