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Design for manufacturability: IC layout density optimization by minimum-variance method
Journal of the Chinese Institute of Industrial Engineers, 2010-07, Vol.27 (4), p.281-293
2010
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Field-Configurable Test Structure Array (FC-TSA): Enabling Design for Monitor, Model, and Manufacturability
IEEE transactions on semiconductor manufacturing, 2008-05, Vol.21 (2), p.169-179
2008
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Infrastructure development and integration of electrical-based dimensional process window checking
IEEE transactions on semiconductor manufacturing, 2004-05, Vol.17 (2), p.123-141
2004
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Addressable failure site test structures (AFS-TS) for CMOS processes: Design guidelines, fault simulation, and implementation
IEEE transactions on semiconductor manufacturing, 2001-11, Vol.14 (4), p.338-355
2001
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Field-Configurable Test Structure Array (FC-TSA) : Enabling Design for Monitor, Model, and Manufacturability : International Conference on Microelectronic Test Structures
IEEE transactions on semiconductor manufacturing, 2008, Vol.21 (2), p.169-179
2008
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The short-loop process tuning & yield evaluation by using the addressable failure site test structures (AFS-TS)
Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130), 2000, p.195-198
2000
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Design and simulation of addressable failure site test structure for IC process control monitor
1999 International Symposium on VLSI Technology, Systems, and Applications. Proceedings of Technical Papers. (Cat. No.99TH8453), 1999, p.219-222
1999
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An assessment of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM): for foundry manufacturing line of multiple-product mixed-run
Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002, 2002, p.55-59
2002
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