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Journal of micromechanics and microengineering, 2004-02, Vol.14 (2), p.220-225
2004
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Sensors and actuators. A, Physical, 2002-04, Vol.97-98, p.771-775
2002
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Sensors and actuators. A, Physical, 2003-01, Vol.103 (1), p.284-290
2003
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Proceedings, IEEE micro electro mechanical systems, 2002, p.93-96
2002
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Proceedings, IEEE micro electro mechanical systems, 2002, p.435-438
2002
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Proceedings, IEEE micro electro mechanical systems, 2002, p.614-617
2002
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Proceedings, IEEE micro electro mechanical systems, 2002, p.471-474
2002
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Sensors and actuators. A. Physical., 2002, Vol.97, p.771-775
2002
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Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), 2000, p.624-627
2000
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