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Inspection of Critical Dimension and Transmission Uniformity of Contact Patterns by Deep UV Imaging and Regression Algorithm

Japanese Journal of Applied Physics, 2000-12, Vol.39 (12S), p.7049

2000

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A Test Structure for Two-Dimensional Analysis of MOSFETs by Hot-Carrier-Induced Photoemission

IEICE transactions on electronics, 2005-05, Vol.E88-C (5), p.811-816

MATSUDA, T.

2005

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A New Inspection Method for Phase-Shift Mask (PSM) on Deep-UV Inspection Light Source

Japanese Journal of Applied Physics, 2002, Vol.41 (Part 1, No. 6B), p.4233-4237

2002

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Quantum Effect in Sub-0.1 µm MOSFET with Pocket Technologies and Its Relevance for the On-Current Condition

Japanese Journal of Applied Physics, 2002-04, Vol.41 (Part 1, No. 4B), p.2359-2362

2002

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Interconnect scaling scenario using a chip level interconnect model

IEEE transactions on electron devices, 2000-01, Vol.47 (1), p.90-96

2000

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Impurity-profile-based threshold-voltage model of pocket-implanted MOSFETs for circuit simulation

IEEE transactions on electron devices, 2002-10, Vol.49 (10), p.1783-1789

2002

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Mask defect inspection method by database comparison with 0.25-0.35 μm sensitivity

Japanese Journal of Applied Physics, 1994-12, Vol.33 (12B), p.7156-7162

1994

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1/f-Noise Characteristics in 100 nm-MOSFETs and Its Modeling for Circuit Simulation

IEICE transactions on electronics, 2005-02, Vol.E88-C (2), p.247-254

MATSUMOTO, S.

2005

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Double pocket architecture using indium and boron for sub-100 nm MOSFETs

IEEE electron device letters, 2001-07, Vol.22 (7), p.330-332

2001

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A test structure for spectrum analysis of hot-carrier-induced photoemission from MOSFETs

IEEE transactions on semiconductor manufacturing, 2003-05, Vol.16 (2), p.233-238

2003

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A Compact Model of the Pinch-off Region of 100 nm MOSFETs Based on the Surface-Potential

IEICE transactions on electronics, 2005-05, Vol.E88-C (5), p.1079-1086

NAVARRO, D.

2005

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Interconnect Scaling Scenario Using A Chip Level Interconnect Model

1997 Symposium on VLSI Technology, 1997, p.53-54

1997

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QUANTUM EFFECT IN SUB-0.1 mu m MOSFET WITH POCKET TECHNOLOGIES AND ITS RELEVANCE FOR THE ON-CURRENT CONDITION

Jpn.J.Appl.Phys ,Part 1. Vol. 41, no. 4B, pp. 2359-2362. 2002, 2002-04, Vol.41 (4B), p.2359-2362

2002

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Impact of the reduction of the gate to drain capacitance on low voltage operated CMOS devices

Digest of technical papers - Symposium on VLSI Technology, 1995, p.69-70

1995

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0.05 mu m-CMOS with ultra shallow source/drain junctions fabricated by 5 KeV ion implantation and rapid thermal annealing

Technical digest - International Electron Devices Meeting, 1994, p.485-488

1994

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A Method of Setting a Gap by Using Dual Diffraction Gratings

Transactions of the Society of Instrument and Control Engineers, 1990/05/31, Vol.26(5), pp.580-582

1990

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Impact of crosstalk on delay time and a hierarchy of interconnects

International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217), 1998, p.291-294

1998

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Inspection of critical dimension- and transmission uniformity of contact patterns by DUV imaging and regression algorithm

Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387), 2000, p.256-257

2000

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Development of simultaneous image acquisition optics with transmitted and reflected light for 45nm (hp) node mask inspection

Digest of Papers Microprocesses and Nanotechnology 2005, 2005, p.224-225

2005

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Advanced die-to-database inspection technique for embedded attenuated phase shift mask

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2002-11, Vol.20 (6), p.3058-3062

2002

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Shallow source/drain extensions for pMOSFETs with high activation and low process damage fabricated by plasma doping

International Electron Devices Meeting. IEDM Technical Digest, 1997, p.475-478

1997

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Comparison of the Binding Nature of Mibolerone to Androgen Receptor of Human Prostate with That of R1881

Nippon Naibunpi Gakkai zasshi, 1988, Vol.64 (8), p.655-665

1988

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A test structure for spectrum analysis of hot-carrier-induced photoemission from subquarter-micron CMOSFETs

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002, 2002, p.95-99

2002

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A test structure for two-dimensional analysis of MOSFETs by hot-carrier-induced photoemission

Proceedings of the 2004 International Conference on Microelectronic Test Structures (IEEE Cat. No.04CH37516), 2004, p.173-177

2004

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Postoperative Management of Tracheoplasty for Thyroid Carcinoma Involving the Trachea

The Journal of the Japan Society for Respiratory Endoscopy, 1984/12/25, Vol.6(4), pp.450-456

1984

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Inspection of Critical Dimension and Transmission Uniformity of Contact Patterns by Deep UV Imaging and Regression Algorithm

A Test Structure for Two-Dimensional Analysis of MOSFETs by Hot-Carrier-Induced Photoemission

A New Inspection Method for Phase-Shift Mask (PSM) on Deep-UV Inspection Light Source

Quantum Effect in Sub-0.1 µm MOSFET with Pocket Technologies and Its Relevance for the On-Current Condition

Interconnect scaling scenario using a chip level interconnect model

Impurity-profile-based threshold-voltage model of pocket-implanted MOSFETs for circuit simulation

Mask defect inspection method by database comparison with 0.25-0.35 μm sensitivity

1/f-Noise Characteristics in 100 nm-MOSFETs and Its Modeling for Circuit Simulation

Double pocket architecture using indium and boron for sub-100 nm MOSFETs

A test structure for spectrum analysis of hot-carrier-induced photoemission from MOSFETs

A Compact Model of the Pinch-off Region of 100 nm MOSFETs Based on the Surface-Potential

Interconnect Scaling Scenario Using A Chip Level Interconnect Model

QUANTUM EFFECT IN SUB-0.1 mu m MOSFET WITH POCKET TECHNOLOGIES AND ITS RELEVANCE FOR THE ON-CURRENT CONDITION

Impact of the reduction of the gate to drain capacitance on low voltage operated CMOS devices

0.05 mu m-CMOS with ultra shallow source/drain junctions fabricated by 5 KeV ion implantation and rapid thermal annealing

A Method of Setting a Gap by Using Dual Diffraction Gratings

Impact of crosstalk on delay time and a hierarchy of interconnects

Inspection of critical dimension- and transmission uniformity of contact patterns by DUV imaging and regression algorithm

Development of simultaneous image acquisition optics with transmitted and reflected light for 45nm (hp) node mask inspection

Advanced die-to-database inspection technique for embedded attenuated phase shift mask

Shallow source/drain extensions for pMOSFETs with high activation and low process damage fabricated by plasma doping

Comparison of the Binding Nature of Mibolerone to Androgen Receptor of Human Prostate with That of R1881

A test structure for spectrum analysis of hot-carrier-induced photoemission from subquarter-micron CMOSFETs

A test structure for two-dimensional analysis of MOSFETs by hot-carrier-induced photoemission

Postoperative Management of Tracheoplasty for Thyroid Carcinoma Involving the Trachea

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