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Applied physics letters, 2014-03, Vol.104 (9)
2014
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Applied physics. A, Materials science & processing, 2016-04, Vol.122 (4), p.1-6, Article 305
2016
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Transactions of Nonferrous Metals Society of China, 2011-03, Vol.21 (1), p.37-41
2011
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Scientific reports, 2016-11, Vol.6 (1), p.37673-37673, Article 37673
2016
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Transactions of Nonferrous Metals Society of China, 2011-03, Vol.21 (1), p.100-103
2011
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Transactions of Nonferrous Metals Society of China, 2009-09, Vol.19 (z1), p.s288-s294
2009
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TRANSACTIONS OF THE JAPAN SOCIETY FOR AERONAUTICAL AND SPACE SCIENCES, 2011, Vol.53(182), pp.237-242
2011
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Applied physics. A, Materials science & processing, 2012-08, Vol.108 (2), p.269-274
2012
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International journal of precision engineering and manufacturing, 2014-06, Vol.15 (6), p.1081-1085
2014
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Transactions of Nonferrous Metals Society of China, 2009-09, Vol.19 (z1), p.s164-s170
2009
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TRANSACTIONS OF THE JAPAN SOCIETY FOR AERONAUTICAL AND SPACE SCIENCES, 2010, Vol.53(181), pp.155-161
2010
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Applied physics. A, Materials science & processing, 2010-11, Vol.101 (2), p.345-348
2010
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Laterally driven thin film PZT actuator with high-aspect-ratio silicon beam for stroke amplification
2006
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International journal of precision engineering and manufacturing, 2006-07, Vol.7 (3), p.56-59
2006
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Japanese Journal of Applied Physics, 2006-03, Vol.45 (3S), p.2082
2006
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Fabrication of 100-nm-Scale Nickel Stamper Based on Chrome/Quartz Mask without Anti-Reflection Layer
2005
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Applied physics. A, Materials science & processing, 2010, Vol.101 (2), p.345-348
2010
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International journal of precision engineering and manufacturing, 2006, Vol.7 (1), p.13-17
2006
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2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009, p.1-1
2009
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19th IEEE International Conference on Micro Electro Mechanical Systems, 2006, p.306-309
2006
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18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005, 2005, p.383-386
2005
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International journal of precision engineering and manufacturing, 2006, Vol.7 (1), p.13-17
2006
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International journal of precision engineering and manufacturing, 2006, Vol.7 (3), p.56-59
2006
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Journal of the Optical Society of Korea, 2003, Vol.7 (3), p.160-164
2003
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