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Installieren Sie die LibKey Nomad-Browsererweiterung und erhalten Sie von vielen Webseiten einfachen Zugriff auf lizenzierte Volltexte oder Open Access Publikationen. Mehr erfahren...IEEE transactions on very large scale integration (VLSI) systems, 2022-10, Vol.30 (10), p.1373-1380
2022
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ECS journal of solid state science and technology, 2021-05, Vol.10 (5), p.53004
2021
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Current Applied Physics, 2009, 9(2), , pp.148-151
2009
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ECS journal of solid state science and technology, 2020-05, Vol.9 (4), p.43003
2020
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ECS journal of solid state science and technology, 2015-01, Vol.4 (1), p.N3164-N3167
2015
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Nucleation and Growth of Pulsed CVD Ru Films from Tricarbonyl[η[sup 4]-cyclohexa-1,3-diene]ruthenium
2008
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2018 XIV International Scientific-Technical Conference on Actual Problems of Electronics Instrument Engineering (APEIE), 2018, p.32-35
2018
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2022 IEEE 23rd International Conference of Young Professionals in Electron Devices and Materials (EDM), 2022, p.378-382
2022
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2021 XV International Scientific-Technical Conference on Actual Problems Of Electronic Instrument Engineering (APEIE), 2021, p.273-277
2021
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2017 18th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM), 2017, p.142-146
2017
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2018 19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM), 2018, p.40-43
2018
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2017 18th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM), 2017, p.477-480
2017
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2018 XIV International Scientific-Technical Conference on Actual Problems of Electronics Instrument Engineering (APEIE), 2018, p.52-57
2018
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2017 18th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM), 2017, p.537-540
2017
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2016 13th International Scientific-Technical Conference on Actual Problems of Electronics Instrument Engineering (APEIE), 2016, Vol.3, p.83-87
2016
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2016 13th International Scientific-Technical Conference on Actual Problems of Electronics Instrument Engineering (APEIE), 2016, Vol.3, p.41-45
2016
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2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, 2009, p.104-111
2009
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2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies, 2009, p.78-80
2009
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2016 17th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM), 2016, p.411-416
2016
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2015 16th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, 2015, p.100-103
2015
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2016 17th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM), 2016, p.549-554
2016
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2014 15th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM), 2014, p.419-423
2014
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2016 17th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM), 2016, p.456-461
2016
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2016 17th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM), 2016, p.611-616
2016
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2014 15th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM), 2014, p.67-71
2014
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