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Hybrid low dielectric constant thin films for microelectronics

Scripta materialia, 2014-03, Vol.74, p.19-24

2014

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Molecular Network Reinforcement of Sol-Gel Glasses

Advanced materials (Weinheim), 2007-11, Vol.19 (22), p.3989-3994

2007

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The efficacy of post porosity plasma protection against vacuum-ultraviolet damage in porous low-k materials

Journal of applied physics, 2015-03, Vol.117 (11)

2015

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A Novel Approach to Functionalized Nanoparticles: Self-Crosslinking of Macromolecules in Ultradilute Solution

Advanced materials (Weinheim), 2001-02, Vol.13 (3), p.204-208

2001

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Investigation of plasma etch damage to porous oxycarbosilane ultra low-k dielectric

Journal of physics. D, Applied physics, 2013-07, Vol.46 (26), p.265303-1-6

2013

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Exceptionally Thermally Stable Polyimides for Second-Order Nonlinear Optical Applications

Science (American Association for the Advancement of Science), 1995-06, Vol.268 (5217), p.1604-1606

1995

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Pore size distributions in nanoporous methyl silsesquioxane films as determined by small angle x-ray scattering

Applied physics letters, 2002-09, Vol.81 (12), p.2232-2234

2002

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Fabrication of Multilayered Nanoporous Poly(methyl silsesquioxane)

Advanced materials (Weinheim), 2002-11, Vol.14 (22), p.1637-1639

2002

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A buckling-based metrology for measuring the elastic moduli of polymeric thin films

Nature materials, 2004-08, Vol.3 (8), p.545-550

2004

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Supercritical CO2/co-solvent extraction of porogens and surfactant templates to obtain ultralow dielectric constant films

Thin solid films, 2008-06, Vol.516 (15), p.4733-4741

2008

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Polymer based tuneable photonic crystals

Physica status solidi. A, Applications and materials science, 2007-11, Vol.204 (11), p.3739-3753

2007

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Macromolecular Architectures

1999

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Ultrahigh-Temperature Polymers for Second-Order Nonlinear Optics. Synthesis and Properties of Robust, Processable, Chromophore-Embedded Polyimides

Chemistry of materials, 2000-06, Vol.12 (6), p.1679-1693

2000

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Toward Successful Integration of Porous Low-k Materials: Strategies Addressing Plasma Damage

ECS journal of solid state science and technology, 2015-01, Vol.4 (1), p.N3071-N3083

2015

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Orientational decay in poled second-order nonlinear optical guest-host polymers : temperature dependence and effects of poling geometry

Journal of applied physics, 1993-06, Vol.73 (12), p.8471-8479

1993

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Polyimides derived from nonaromatic monomers: synthesis, characterization and potential applications

Reactive & functional polymers, 1996-06, Vol.30 (1), p.61-69

1996

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Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films

Applied physics letters, 2003-06, Vol.82 (24), p.4328-4330

2003

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Orientational relaxation in electric field poled guest-host and side-chain polymers below Tg

Macromolecules, 1993-07, Vol.26 (14), p.3720-3722

1993

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Donor-Embedded Nonlinear Optical Side Chain Polyimides Containing No Flexible Tether: Materials of Exceptional Thermal Stability for Electrooptic Applications

Macromolecules, 1995-07, Vol.28 (14), p.4970-4974

1995

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First Example of a Nanoporous High-Temperature Polymer Thermoset: Eluding Transition-Time-Temperature Constraints Associated with Organic Thermosets

Advanced materials (Weinheim), 2004-09, Vol.16 (17), p.1525-1529

2004

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Application of Complex Macromolecular Architectures for Advanced Microelectronic Materials

Chemistry : a European journal, 2002-08, Vol.8 (15), p.3308-3319

2002

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Supercritical CO2 extraction of porogen phase: An alternative route to nanoporous dielectrics

Journal of materials research, 2004-11, Vol.19 (11), p.3224-3233

2004

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Accurate Measurement of Porous Low-k Thin-Films by Nanoindentation: Densification Scaling versus Substrate Effects

ECS journal of solid state science and technology, 2017, Vol.6 (10), p.N209-N212

2017

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Impact of low-k structure and porosity on etch processes

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2013-01, Vol.31 (1)

2013

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Templating Nanoporosity in Thin-Film Dielectric Insulators

Advanced materials (Weinheim), 1998-09, Vol.10 (13), p.1049-1053

1998

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Hybrid low dielectric constant thin films for microelectronics

Molecular Network Reinforcement of Sol-Gel Glasses

The efficacy of post porosity plasma protection against vacuum-ultraviolet damage in porous low-k materials

A Novel Approach to Functionalized Nanoparticles: Self-Crosslinking of Macromolecules in Ultradilute Solution

Investigation of plasma etch damage to porous oxycarbosilane ultra low-k dielectric

Exceptionally Thermally Stable Polyimides for Second-Order Nonlinear Optical Applications

Pore size distributions in nanoporous methyl silsesquioxane films as determined by small angle x-ray scattering

Fabrication of Multilayered Nanoporous Poly(methyl silsesquioxane)

A buckling-based metrology for measuring the elastic moduli of polymeric thin films

Supercritical CO2/co-solvent extraction of porogens and surfactant templates to obtain ultralow dielectric constant films

Polymer based tuneable photonic crystals

Macromolecular Architectures

Ultrahigh-Temperature Polymers for Second-Order Nonlinear Optics. Synthesis and Properties of Robust, Processable, Chromophore-Embedded Polyimides

Toward Successful Integration of Porous Low-k Materials: Strategies Addressing Plasma Damage

Orientational decay in poled second-order nonlinear optical guest-host polymers : temperature dependence and effects of poling geometry

Polyimides derived from nonaromatic monomers: synthesis, characterization and potential applications

Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films

Orientational relaxation in electric field poled guest-host and side-chain polymers below Tg

Donor-Embedded Nonlinear Optical Side Chain Polyimides Containing No Flexible Tether: Materials of Exceptional Thermal Stability for Electrooptic Applications

First Example of a Nanoporous High-Temperature Polymer Thermoset: Eluding Transition-Time-Temperature Constraints Associated with Organic Thermosets

Application of Complex Macromolecular Architectures for Advanced Microelectronic Materials

Supercritical CO2 extraction of porogen phase: An alternative route to nanoporous dielectrics

Accurate Measurement of Porous Low-k Thin-Films by Nanoindentation: Densification Scaling versus Substrate Effects

Impact of low-k structure and porosity on etch processes

Templating Nanoporosity in Thin-Film Dielectric Insulators

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