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Dependence of the catalytic decomposition of PH3 on wire material

Thin solid films, 2015-01, Vol.575, p.9-11

Umemoto, Hironobu

2015

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Gas-phase diagnoses in catalytic chemical vapor deposition (hot-wire CVD) processes

Thin solid films, 2015-01, Vol.575, p.3-8

Umemoto, Hironobu

2015

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Production and Detection of H Atoms and Vibrationally Excited H2 Molecules in CVD Processes

Chemical vapor deposition, 2010-12, Vol.16 (10-12), p.275-290

Umemoto, Hironobu

2010

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Catalytic Chemical Vapor Deposition: Technology and Applications of Cat-CVD

2019

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Decomposition processes of diborane and borazane (ammonia-borane complex) on hot wire surfaces

Thin solid films, 2015-11, Vol.595, p.231-234

2015

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A Clean Source of B atoms without Using Explosive Boron Compounds

Bulletin of the Chemical Society of Japan, 2016-08, Vol.89 (8), p.899-901

2016

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Oxygen additive effects on decomposition rate of poly(vinyl phenol)-based polymers using hydrogen radicals produced by a tungsten hot-wire catalyst

Thin solid films, 2019-06, Vol.679, p.22-26

2019

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Evaluation of Decomposition Property of Photoresist by Oxygen Radicals Using Helium-Oxygen Mixtures

Journal of Photopolymer Science and Technology, 2020/07/01, Vol.33(4), pp.433-437

2020

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Decomposition processes of H3NBH3 (borazane), (BH)3(NH)3 (borazine), and B(CH3)3 (trimethylboron) on heated W wire surfaces

Chemical physics letters, 2015-10, Vol.639, p.7-10

2015

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Effects of Nitrogen Dilution on the Photoresist Removal Rate by Hydrogen Radicals

Journal of Photopolymer Science and Technology, 2020/07/01, Vol.33(4), pp.427-431

2020

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Removal of Novolac Photoresist with Various Concentrations of Photo-active Compound Using H2/O2 Mixtures Activated on a Tungsten Hot-wire Catalyst

Journal of photopolymer science and technology, 2021-09, Vol.34 (5)

2021

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Determination of Singlet Oxygen and Electron Transfer Mediated Mechanisms of Photosensitized Protein Damage by Phosphorus(V)porphyrins

Chemical research in toxicology, 2015-02, Vol.28 (2), p.262-267

2015

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Mitochondrial DNA diversity and geographical distribution of sexual and asexual strains of the braconid parasitoid Meteorus pulchricornis

Entomologia experimentalis et applicata, 2019-12, Vol.167 (12), p.977-985

2019

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Photoactive Compounds Effects on Removal Rate for Polystyrene-type Polymers by H2/O2 Mixture Activated by Hot Tungsten Wire

Journal of Photopolymer Science and Technology, 2023/06/15, Vol.36(5), pp.283-290

2023

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Relationship between Oxygen Additive Amount and Photoresist Removal Rate Using H Radicals Generated on an Iridium Hot-Wire Catalyst

Journal of Photopolymer Science and Technology, 2019/06/24, Vol.32(4), pp.609-614

2019

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Removal of Novolac Photoresist with Various Concentrations of Photo-active Compound Using H2/O2 Mixtures Activated on a Tungsten Hot-wire Catalyst

Journal of Photopolymer Science and Technology, 2021/06/11, Vol.34(5), pp.499-504

2021

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Molecular dissociation and vibrational excitation on a metal hot filament surface

Journal of physics. D, Applied physics, 2014-01, Vol.47 (2), p.25503-1-025503-12

2014

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Production of B Atoms and BH Radicals from B2H6/He/H2 Mixtures Activated on Heated W Wires

The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory, 2014-07, Vol.118 (28), p.5156-5163

2014

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Removal of Polymers for KrF and ArF Photoresist Using Hydrogen Radicals Containing a Small Amount of Oxidizing Radicals

Journal of Photopolymer Science and Technology, 2018/06/25, Vol.31(3), pp.419-424

2018

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Production and detection of reducing and oxidizing radicals in the catalytic decomposition of H2∕O2 mixtures on heated tungsten surfaces

Journal of applied physics, 2008-02, Vol.103 (3)

2008

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Catalytic Decomposition of PH3 on Heated Tungsten Wire Surfaces

Jpn J Appl Phys, 2012-08, Vol.51 (8), p.086501-086501-9

2012

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Oxygen additive amount dependence of rate of photoresist removal by H radicals generated on a tungsten hot-wire catalyst

Japanese Journal of Applied Physics, 2016-07, Vol.55 (7), p.76503

2016

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Enhancement of Photoresist Removal Rate by Using Atomic Hydrogen Generated under Low-pressure Conditions

Journal of Photopolymer Science and Technology, 2015/05/11, Vol.28(2), pp.303-306

2015

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Catalytic decomposition of phosphorus compounds to produce phosphorus atoms

Japanese Journal of Applied Physics, 2014-04, Vol.53 (5S1), p.5-1-05FM02-4

2014

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In-situ production of PH3 from red phosphorus and atomic hydrogen

Chemical physics letters, 2011-09, Vol.514 (1-3), p.26-28

2011

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Dependence of the catalytic decomposition of PH3 on wire material

Gas-phase diagnoses in catalytic chemical vapor deposition (hot-wire CVD) processes

Production and Detection of H Atoms and Vibrationally Excited H2 Molecules in CVD Processes

Catalytic Chemical Vapor Deposition: Technology and Applications of Cat-CVD

Decomposition processes of diborane and borazane (ammonia-borane complex) on hot wire surfaces

A Clean Source of B atoms without Using Explosive Boron Compounds

Oxygen additive effects on decomposition rate of poly(vinyl phenol)-based polymers using hydrogen radicals produced by a tungsten hot-wire catalyst

Evaluation of Decomposition Property of Photoresist by Oxygen Radicals Using Helium-Oxygen Mixtures

Decomposition processes of H3NBH3 (borazane), (BH)3(NH)3 (borazine), and B(CH3)3 (trimethylboron) on heated W wire surfaces

Effects of Nitrogen Dilution on the Photoresist Removal Rate by Hydrogen Radicals

Removal of Novolac Photoresist with Various Concentrations of Photo-active Compound Using H2/O2 Mixtures Activated on a Tungsten Hot-wire Catalyst

Determination of Singlet Oxygen and Electron Transfer Mediated Mechanisms of Photosensitized Protein Damage by Phosphorus(V)porphyrins

Mitochondrial DNA diversity and geographical distribution of sexual and asexual strains of the braconid parasitoid Meteorus pulchricornis

Photoactive Compounds Effects on Removal Rate for Polystyrene-type Polymers by H2/O2 Mixture Activated by Hot Tungsten Wire

Relationship between Oxygen Additive Amount and Photoresist Removal Rate Using H Radicals Generated on an Iridium Hot-Wire Catalyst

Removal of Novolac Photoresist with Various Concentrations of Photo-active Compound Using H2/O2 Mixtures Activated on a Tungsten Hot-wire Catalyst

Molecular dissociation and vibrational excitation on a metal hot filament surface

Production of B Atoms and BH Radicals from B2H6/He/H2 Mixtures Activated on Heated W Wires

Removal of Polymers for KrF and ArF Photoresist Using Hydrogen Radicals Containing a Small Amount of Oxidizing Radicals

Production and detection of reducing and oxidizing radicals in the catalytic decomposition of H2∕O2 mixtures on heated tungsten surfaces

Catalytic Decomposition of PH3 on Heated Tungsten Wire Surfaces

Oxygen additive amount dependence of rate of photoresist removal by H radicals generated on a tungsten hot-wire catalyst

Enhancement of Photoresist Removal Rate by Using Atomic Hydrogen Generated under Low-pressure Conditions

Catalytic decomposition of phosphorus compounds to produce phosphorus atoms

In-situ production of PH3 from red phosphorus and atomic hydrogen

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