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Toward atom probe tomography of microelectronic devices

Journal of physics. Conference series, 2011-11, Vol.326 (1), p.012030-4

2011

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Atom probe tomography and transmission electron microscopy of a Mg-doped AlGaN/GaN superlattice

Ultramicroscopy, 2011-02, Vol.111 (3), p.207-211

2011

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Cryogenic UHV Specimen Preparation for APT: A Transfer Solution

Microscopy and microanalysis, 2019-08, Vol.25 (S2), p.528-529

2019

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Correlative Analysis in the Semiconductor Industry

Microscopy and microanalysis, 2019-08, Vol.25 (S2), p.2502-2503

2019

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Measurement of Detection Efficiency in Atom Probe Tomography

Microscopy and microanalysis, 2014-08, Vol.20 (S3), p.1160-1161

2014

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Performance Advances in LEAP systems

Microscopy and microanalysis, 2014-08, Vol.20 (S3), p.1120-1121

2014

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Improving Data Quality in Atom Probe Tomography

Microscopy and microanalysis, 2014-08, Vol.20 (S3), p.2088-2089

2014

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Atom Probe Tomography Analysis of Grain Boundaries in CdTe

Microscopy and microanalysis, 2012-07, Vol.18 (S2), p.928-929

2012

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Performance of local electrodes in the local electrode atom probe

Ultramicroscopy, 2007-09, Vol.107 (9), p.750-755

2007

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New Applications in Atom Probe Tomography

Microscopy and microanalysis, 2012-07, Vol.18 (S2), p.926-927

2012

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Analysis of Bulk Dielectrics with Atom Probe Tomography

Microscopy and microanalysis, 2008-08, Vol.14 (S2), p.1254-1255

2008

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Mg dopant distribution in an AlGaN/GaN p-type superlattice assessed using atom probe tomography, TEM and SIMS

Journal of physics. Conference series, 2010-02, Vol.209 (1), p.012014

2010

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Field ion specimen preparation from near-surface regions

Ultramicroscopy, 1998-06, Vol.73 (1), p.273-278

1998

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Atom Probe Tomography Productivity Enhancements

Microscopy and microanalysis, 2019-08, Vol.25 (S2), p.522-523

2019

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Site-Specific FIB Preparation of Atom Probe Samples

Microscopy and microanalysis, 2004-08, Vol.10 (S02), p.1150-1151

2004

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A High Multiple Hits Correction Factor for Atom Probe Tomography

Microscopy and microanalysis, 2018-08, Vol.24 (S1), p.1084-1085

2018

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Data Quality Improvements in the Voltage-Pulsed LEAP 5000 R/XR

Microscopy and microanalysis, 2015-08, Vol.21 (S3), p.41-42

2015

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Towards Quantitative Analysis of Nitrogen in Microelectronics Applications for Atom Probe Tomography

Microscopy and microanalysis, 2008-08, Vol.14 (S2), p.1230-1231

2008

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Arsenic Segregation to Dislocation Loops in Silicon

Microscopy and microanalysis, 2008-08, Vol.14 (S2), p.324-325

2008

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Nanoscale Characterization of Magnetic Multilayers with Atom Probe Tomography

Microscopy and microanalysis, 2004-08, Vol.10 (S02), p.518-519

2004

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Using Spatial Distribution Maps to Estimate APT Efficiency

Microscopy and microanalysis, 2013-08, Vol.19 (S2), p.1000-1001

2013

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Multi-Region Data Simulation for Detection Limit Investigations in IVAS

Microscopy and microanalysis, 2013-08, Vol.19 (S2), p.986-987

2013

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First Data from a Commercial Local Electrode Atom Probe (LEAP)

Microscopy and microanalysis, 2004-06, Vol.10 (3), p.373-383

2004

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Background Removal Methods Applied to Atom Probe Data

Microscopy and microanalysis, 2009-07, Vol.15 (S2), p.256-257

2009

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Laser-Specimen Interactions in Atom Probe Tomography

Microscopy and microanalysis, 2012-07, Vol.18 (S2), p.584-585

2012

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Toward atom probe tomography of microelectronic devices

Atom probe tomography and transmission electron microscopy of a Mg-doped AlGaN/GaN superlattice

Cryogenic UHV Specimen Preparation for APT: A Transfer Solution

Correlative Analysis in the Semiconductor Industry

Measurement of Detection Efficiency in Atom Probe Tomography

Performance Advances in LEAP systems

Improving Data Quality in Atom Probe Tomography

Atom Probe Tomography Analysis of Grain Boundaries in CdTe

Performance of local electrodes in the local electrode atom probe

New Applications in Atom Probe Tomography

Analysis of Bulk Dielectrics with Atom Probe Tomography

Mg dopant distribution in an AlGaN/GaN p-type superlattice assessed using atom probe tomography, TEM and SIMS

Field ion specimen preparation from near-surface regions

Atom Probe Tomography Productivity Enhancements

Site-Specific FIB Preparation of Atom Probe Samples

A High Multiple Hits Correction Factor for Atom Probe Tomography

Data Quality Improvements in the Voltage-Pulsed LEAP 5000 R/XR

Towards Quantitative Analysis of Nitrogen in Microelectronics Applications for Atom Probe Tomography

Arsenic Segregation to Dislocation Loops in Silicon

Nanoscale Characterization of Magnetic Multilayers with Atom Probe Tomography

Using Spatial Distribution Maps to Estimate APT Efficiency

Multi-Region Data Simulation for Detection Limit Investigations in IVAS

First Data from a Commercial Local Electrode Atom Probe (LEAP)

Background Removal Methods Applied to Atom Probe Data

Laser-Specimen Interactions in Atom Probe Tomography

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