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Polycrystalline diamond film fabrication using modulated inductively coupled thermal plasmas at different pressure conditions

Journal of applied physics, 2019-12, Vol.126 (22)

2019

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Mechanisms of low-frequency dielectric barrier discharge (DBD) plasma driven by unipolar pulses and bipolar pulses

AIP advances, 2021-02, Vol.11 (2), p.025022-025022-9

2021

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Novel design of high voltage pulse source for efficient dielectric barrier discharge generation by using silicon diodes for alternating current

Review of scientific instruments, 2017-06, Vol.88 (6)

2017

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Systematic investigation of the effect of N2 admixture ratio on barrier discharge in helium

Journal of physics. D, Applied physics, 2018-12, Vol.52 (6)

2018

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Effects of dielectric properties on electrical characteristics of dielectric barrier discharge generated by low frequency uni-polar high voltage pulses

Japanese Journal of Applied Physics, 2019-11, Vol.58 (11), p.111001

2019

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Evaluation of extra- and intracellular OH radical generation, cancer cell injury, and apoptosis induced by a non-thermal atmospheric-pressure plasma jet

Journal of physics. D, Applied physics, 2013-10, Vol.46 (42), p.425401-1-8

2013

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Temporal Variations of Optical Emission Spectra in Microwave-Excited Plasma in Saturated Water Vapor under Reduced Pressure during Photoresist Removal

Journal of Photopolymer Science and Technology, 2021/06/11, Vol.34(5), pp.469-478

2021

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Improved Uniformity of Photoresist Ashing for a Half-Inch Wafer with Double U-shaped Antenna Structure in a Microwave-Excited Water Vapor Plasma

Journal of photopolymer science and technology, 2021-09, Vol.34 (5)

2021

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Improved Uniformity of Photoresist Ashing for a Half-Inch Wafer with Double U-shaped Antenna Structure in a Microwave-Excited Water Vapor Plasma

Journal of Photopolymer Science and Technology, 2021/06/11, Vol.34(5), pp.479-484

2021

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A high-speed photoresist removal process using multibubble microwave plasma under a mixture of multiphase plasma environment

Applied physics letters, 2013-09, Vol.103 (14)

2013

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Comparisons of Two Models for the Simulation of a DC Arc Plasma Torch

Journal of thermal spray technology, 2013-03, Vol.22 (2-3), p.183-191

2013

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High-rate synthesis of Si nanowires using modulated induction thermal plasmas

Applied physics express, 2017-09, Vol.10 (9), p.96201

2017

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Spatial distribution of Ti vapor admixture ratio in Ar induction thermal plasma torch during Ti feedstock injection

Japanese Journal of Applied Physics, 2018-03, Vol.57 (3), p.36101

2018

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Nanostructure formation on silicon surfaces by using low energy helium plasma exposure

Japanese Journal of Applied Physics, 2016-12, Vol.55 (12), p.120301

2016

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An Improved Local Thermal Equilibrium Model of DC Arc Plasma Torch

IEEE transactions on plasma science, 2011-10, Vol.39 (10), p.1974-1982

2011

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Cathode diameter and operating parameter effects on hafnium cathode evaporation for oxygen plasma cutting arc

Journal of physics. D, Applied physics, 2012-10, Vol.45 (43), p.435203-1-14

2012

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Influence of sheath gas flow rate in Ar induction thermal plasma with Ti powder injection on the plasma temperature by numerical calculation

MATEC Web of Conferences, 2018, Vol.218, p.4030

2018

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Numerical investigation of the effect of cathode holder shape on hafnium cathode evaporation for an oxygen plasma cutting arc

Journal of physics. D, Applied physics, 2013-06, Vol.46 (22), p.224012-1-10

2013

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Fundamentals of planar-type inductively coupled thermal plasmas on a substrate for large-area material processing

Japanese Journal of Applied Physics, 2016-07, Vol.55 (7S2), p.7-07LB03

2016

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Influence of coil current modulation on TiO2 nanoparticle synthesis using pulse-modulated induction thermal plasmas

Thin solid films, 2011-08, Vol.519 (20), p.7100-7105

2011

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The LTE Thermofluid Simulation of Ar/SF6 Gas-Blast Arcs in a Nozzle Space in an Arc Device

Denki Gakkai ronbunshi. B, Enerugi, denki kiki, denryoku, 2016, Vol.136 (9), p.741-748

2016

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Enhancement of Non-Equilibrium Atmospheric Pressure He Plasma Discharges by Using Silicon Diode for Alternating Current

Journal of physics. Conference series, 2013-06, Vol.441 (1), p.12018-6

2013

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Spallation Particle Ejection From Polymer Surface Irradiated by Thermal Plasmas

IEEE transactions on plasma science, 2011-11, Vol.39 (11), p.2776-2777

2011

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Effect of polymer ablation gas on arc quenching properties around current zero

Electrical engineering in Japan, 2012-08, Vol.180 (3), p.32-45

2012

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Generation of high-power arbitrary-wave-form modulated inductively coupled plasmas for materials processing

Applied physics letters, 2007-02, Vol.90 (7), p.071502-071502-3

2007

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Polycrystalline diamond film fabrication using modulated inductively coupled thermal plasmas at different pressure conditions

Mechanisms of low-frequency dielectric barrier discharge (DBD) plasma driven by unipolar pulses and bipolar pulses

Novel design of high voltage pulse source for efficient dielectric barrier discharge generation by using silicon diodes for alternating current

Systematic investigation of the effect of N2 admixture ratio on barrier discharge in helium

Effects of dielectric properties on electrical characteristics of dielectric barrier discharge generated by low frequency uni-polar high voltage pulses

Evaluation of extra- and intracellular OH radical generation, cancer cell injury, and apoptosis induced by a non-thermal atmospheric-pressure plasma jet

Temporal Variations of Optical Emission Spectra in Microwave-Excited Plasma in Saturated Water Vapor under Reduced Pressure during Photoresist Removal

Improved Uniformity of Photoresist Ashing for a Half-Inch Wafer with Double U-shaped Antenna Structure in a Microwave-Excited Water Vapor Plasma

Improved Uniformity of Photoresist Ashing for a Half-Inch Wafer with Double U-shaped Antenna Structure in a Microwave-Excited Water Vapor Plasma

A high-speed photoresist removal process using multibubble microwave plasma under a mixture of multiphase plasma environment

Comparisons of Two Models for the Simulation of a DC Arc Plasma Torch

High-rate synthesis of Si nanowires using modulated induction thermal plasmas

Spatial distribution of Ti vapor admixture ratio in Ar induction thermal plasma torch during Ti feedstock injection

Nanostructure formation on silicon surfaces by using low energy helium plasma exposure

An Improved Local Thermal Equilibrium Model of DC Arc Plasma Torch

Cathode diameter and operating parameter effects on hafnium cathode evaporation for oxygen plasma cutting arc

Influence of sheath gas flow rate in Ar induction thermal plasma with Ti powder injection on the plasma temperature by numerical calculation

Numerical investigation of the effect of cathode holder shape on hafnium cathode evaporation for an oxygen plasma cutting arc

Fundamentals of planar-type inductively coupled thermal plasmas on a substrate for large-area material processing

Influence of coil current modulation on TiO2 nanoparticle synthesis using pulse-modulated induction thermal plasmas

The LTE Thermofluid Simulation of Ar/SF6 Gas-Blast Arcs in a Nozzle Space in an Arc Device

Enhancement of Non-Equilibrium Atmospheric Pressure He Plasma Discharges by Using Silicon Diode for Alternating Current

Spallation Particle Ejection From Polymer Surface Irradiated by Thermal Plasmas

Effect of polymer ablation gas on arc quenching properties around current zero

Generation of high-power arbitrary-wave-form modulated inductively coupled plasmas for materials processing

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